News Article

Meaglow To Upgrade ALD Nitride Deposition Tool In Turkey

The hollow cathode plasma source reduces the oxygen contamination in ALD systems and increases the quality of thin III-nitride films during growth

Meaglow is to install a hollow cathode plasma source for the group of Necmi Biyikli, a professor at the Institute of Materials Science and Nanotechnology, at Bilkent University in Turkey.

The plasma source is being used to upgrade their Atomic Layer Deposition (ALD) system by replacing an inductively coupled plasma source. This enhancement will reduce the oxygen contamination in ALD systems and increase the quality of nitride thin films grown.

The III-nitrides grown at the university with the ALD system are used for LEDs and power electronic applications. The actual materials grown using the system are AlN, GaN and InN.

Bilkent University researchers will  be presenting some of their findings about suitable applications for these products at the ALD 2013 conference on Wednesday.:

The presentation will take place from 9:00 - 9:15am and is entiltled, "Characterization and Electronic Device Applications of III-nitride Thin Films Deposited by Plasma-enhanced ALD," and will be presented by student finalist C. Ozgit-Akgun from Bilkent.


"The Bilkent system was easy to retrofit and the Meaglow Plasma source was the perfect solution for their oxygen contamination problem," says Butcher, Chief Scientist of Meaglow.

ALD system converted with a hollow cathode plasma source

Initial results show a significant reduction of oxygen content in compound nitride films grown. Results will be presented October 27th to November 1st at the 224th ECS Fall Meeting in San Francisco, California at an invited talk presented at the symposium on "Atomic Layer Deposition Applications".

Meaglow is now focused on commercialising its hollow cathode plasma technology which also has the advantage of scalability to large deposition areas. Meaglow is seeking additional ALD system owners and suppliers interested in removing the oxygen contamination in their films.

AngelTech Live III: Join us on 12 April 2021!

AngelTech Live III will be broadcast on 12 April 2021, 10am BST, rebroadcast on 14 April (10am CTT) and 16 April (10am PST) and will feature online versions of the market-leading physical events: CS International and PIC International PLUS a brand new Silicon Semiconductor International Track!

Thanks to the great diversity of the semiconductor industry, we are always chasing new markets and developing a range of exciting technologies.

2021 is no different. Over the last few months interest in deep-UV LEDs has rocketed, due to its capability to disinfect and sanitise areas and combat Covid-19. We shall consider a roadmap for this device, along with technologies for boosting its output.

We shall also look at microLEDs, a display with many wonderful attributes, identifying processes for handling the mass transfer of tiny emitters that hold the key to commercialisation of this technology.

We shall also discuss electrification of transportation, underpinned by wide bandgap power electronics and supported by blue lasers that are ideal for processing copper.

Additional areas we will cover include the development of GaN ICs, to improve the reach of power electronics; the great strides that have been made with gallium oxide; and a look at new materials, such as cubic GaN and AlScN.

Having attracted 1500 delegates over the last 2 online summits, the 3rd event promises to be even bigger and better – with 3 interactive sessions over 1 day and will once again prove to be a key event across the semiconductor and photonic integrated circuits calendar.

So make sure you sign up today and discover the latest cutting edge developments across the compound semiconductor and integrated photonics value chain.



Search the news archive

To close this popup you can press escape or click the close icon.
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.

Please subscribe me to:


You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in:
Live Event