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Zygo Reveals Flexible 3D Imaging And Surface Metrology Tool

The Nexview profiler has 3D imaging and measurement system for rapid, precise, quantitative, and interactive surface metrology suited to semiconductor analysis
Zygo's new 3D profiler metrology tool is suited for both the production and scientific research markets and the company says this it is its all-new flagship product.





Zygo Nextview 3D profiler


The Nexview profiler is optimised for non-contact surface metrology of an extensive variety of samples and surfaces from the very smooth to the very rough. With sub-nanometre vertical resolution at all magnifications, metrologists need not sacrifice precision for changes in field of view.





SiC mirror showing crystal grains


Using non-contact 3D technology, the system will safely measure fragile and transparent materials without altering the test surface. Its high speed performance, even on steep slopes up to 85 degrees, lets the Nexview profiler save time compared to magnification dependent technologies.


Zygo says the Nexview profiler and its Mx software package produce extremely high fidelity surface topography maps for measuring roughness, flatness, angles, films, steps, and more.  


This new software platform acts as a simple to use and learn single interface for system control and data analysis, providing rich interactive 3D maps, quantitative topography information, and intuitive measurement navigation.


Recipe changes are quick and easy with new recipes typically taking only minutes to configure.


What's more, specialised software modules for measurement in the presence of transparent films and 2D vision analysis are available for expanded functionality.


"As a new concept in surface mapping, the Nexview profiler is a significant leap forward in data collection and interactive surface analysis. These are in high demand for our customers with challenging and high precision requirements. It enables a wide variety of topography applications previously not addressed, and expands our market opportunities," comments Don Battistoni, Executive Director of Worldwide Sales, Marketing, and Service for Zygo Corporation.




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