Info
Info
News Article

Shimadzu Unveils Compact Turbo Molecular Vacuum Pumps

The new series of pumps, which could be used in the MOCVD growth of III-V materials, should enable cost reductions








On 2nd September 2013, Shimadzu Corporation will launch the company’s new “TMP-X2905/X3405" series of turbo molecular pumps.

With integrated power supplies and 3000 L/s class pumping speeds for semiconductor and flat panel display manufactures, the Turbo molecular pumps (TMPs) produce a vacuum due to the high speed rotation of turbines that enables vacuum pumping at the molecular flow level.

TMPs are essential in applications where oil free, clean and high vacuums are essential.

The versatile pumps are compact and feature integrated power supplies for installation in both light and hard processes.

Shimadzu positions TMP as global strategic products in its product portfolio and will expand sales of the TMP-X series to North America, Taiwan, Korea, and China.

Following the recent fall in the price of electronics equipment incorporating semiconductor devices and flat panel displays, there are growing demands for innovative methods to reduce the costs of semiconductor and flat panel display manufacturing equipment.

Regarding turbo molecular pumps attached to manufacturing equipment, there are growing needs for a move away from pumps where power supplies are connected with separate cables, to pumps where the power supplies are integrated into the body of the TMP itself.

Such ‘integrated power supply’ TMP would enable a reduction in the number of parts for manufacturing equipment, and enable reductions in costs.

Shimadzu Corporation already sells the TMP-V series of pumps with integrated power supplies for pumping inert gases used in sputter systems for ‘light processing’. The TMP-X series were developed for pumping corrosive gases used in etching equipment - so called ‘hard processing’.

This series will offer pumping speeds from 300 L/s to 4000 L/s to address the multifaceted needs of semiconductor and flat panel display manufactures.

According to Shimadzu, the main features of the TMP-X series are listed below.

1. Industry’s most compact TMP with an integrated power supply.

Redesign of conventional integrated power supply TMP enabled a 15 percent reduction in the height of the new pump whilst maintaining the pumping performance. Also, the TMP-X pumps are almost the same size as the main body of conventional TMP with separate power supply cables that are used for hard processing.

Pumps in the TMP-X series do not require racks and cables - as is the case in conventional separate power supply TMP - thus this series offers a greater degree of freedom in the design of low cost, small footprint manufacturing equipment.

2. Cope with hard processes employing corrosive gases

The incorporation of a pump temperature control function and improvement of the motor power output has enabled the use of the TMP-X series of pumps for manufacturing processes involving high gas flow rates and reactive gases.

What's more, Shimadzu Corporation have continued to employ anti-corrosive coating and dynamic seals in the new pumps, thus preventing erosion of the TMP and ensuring high reliability even for hard processes employing highly corrosive gases.

3. Low power consumption

The use of a newly developed power unit and high efficiency motor has enabled a 15% reduction (under conditions of zero load) in the power consumption compared to conventional turbo molecular pumps. This series of TMP have a low load impact on the environment.

Magnetic bearing type integrated turbo molecular pump specifications

Prices:

TMP-X2905 series    5,100,000 JPY (excluding tax)

TMP-X3405 series    5,500,000 JPY (excluding tax)

Sizes:

TMP-X2905 series (VG250)   f350 ´ H458 mm   115kg

TMP-X3405 series (VG300)   f400 ´ H395 mm   89kg

The firm plans to sell 500 units of its TMP-X2905/X3405 in the first year.



AngelTech Live III: Join us on 12 April 2021!

AngelTech Live III will be broadcast on 12 April 2021, 10am BST, rebroadcast on 14 April (10am CTT) and 16 April (10am PST) and will feature online versions of the market-leading physical events: CS International and PIC International PLUS a brand new Silicon Semiconductor International Track!

Thanks to the great diversity of the semiconductor industry, we are always chasing new markets and developing a range of exciting technologies.

2021 is no different. Over the last few months interest in deep-UV LEDs has rocketed, due to its capability to disinfect and sanitise areas and combat Covid-19. We shall consider a roadmap for this device, along with technologies for boosting its output.

We shall also look at microLEDs, a display with many wonderful attributes, identifying processes for handling the mass transfer of tiny emitters that hold the key to commercialisation of this technology.

We shall also discuss electrification of transportation, underpinned by wide bandgap power electronics and supported by blue lasers that are ideal for processing copper.

Additional areas we will cover include the development of GaN ICs, to improve the reach of power electronics; the great strides that have been made with gallium oxide; and a look at new materials, such as cubic GaN and AlScN.

Having attracted 1500 delegates over the last 2 online summits, the 3rd event promises to be even bigger and better – with 3 interactive sessions over 1 day and will once again prove to be a key event across the semiconductor and photonic integrated circuits calendar.

So make sure you sign up today and discover the latest cutting edge developments across the compound semiconductor and integrated photonics value chain.

REGISTER FOR FREE

VIEW SESSIONS

Info
×
Search the news archive

To close this popup you can press escape or click the close icon.
×
Logo
×
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in:
 
X
Info
X
Info
{taasPodcastNotification}
Live Event