Shimadzu Unveils Compact Turbo Molecular Vacuum Pumps
The new series of pumps, which could be used in the MOCVD growth of III-V materials, should enable cost reductions
On 2nd September 2013, Shimadzu Corporation will launch the company’s new “TMP-X2905/X3405" series of turbo molecular pumps.
With integrated power supplies and 3000 L/s class pumping speeds for semiconductor and flat panel display manufactures, the Turbo molecular pumps (TMPs) produce a vacuum due to the high speed rotation of turbines that enables vacuum pumping at the molecular flow level.
TMPs are essential in applications where oil free, clean and high vacuums are essential.
The versatile pumps are compact and feature integrated power supplies for installation in both light and hard processes.
Shimadzu positions TMP as global strategic products in its product portfolio and will expand sales of the TMP-X series to North America, Taiwan, Korea, and China.
Following the recent fall in the price of electronics equipment incorporating semiconductor devices and flat panel displays, there are growing demands for innovative methods to reduce the costs of semiconductor and flat panel display manufacturing equipment.
Regarding turbo molecular pumps attached to manufacturing equipment, there are growing needs for a move away from pumps where power supplies are connected with separate cables, to pumps where the power supplies are integrated into the body of the TMP itself.
Such ‘integrated power supply’ TMP would enable a reduction in the number of parts for manufacturing equipment, and enable reductions in costs.
Shimadzu Corporation already sells the TMP-V series of pumps with integrated power supplies for pumping inert gases used in sputter systems for ‘light processing’. The TMP-X series were developed for pumping corrosive gases used in etching equipment - so called ‘hard processing’.
This series will offer pumping speeds from 300 L/s to 4000 L/s to address the multifaceted needs of semiconductor and flat panel display manufactures.
According to Shimadzu, the main features of the TMP-X series are listed below.
1. Industry’s most compact TMP with an integrated power supply.
Redesign of conventional integrated power supply TMP enabled a 15 percent reduction in the height of the new pump whilst maintaining the pumping performance. Also, the TMP-X pumps are almost the same size as the main body of conventional TMP with separate power supply cables that are used for hard processing.
Pumps in the TMP-X series do not require racks and cables - as is the case in conventional separate power supply TMP - thus this series offers a greater degree of freedom in the design of low cost, small footprint manufacturing equipment.
2. Cope with hard processes employing corrosive gases
The incorporation of a pump temperature control function and improvement of the motor power output has enabled the use of the TMP-X series of pumps for manufacturing processes involving high gas flow rates and reactive gases.
What's more, Shimadzu Corporation have continued to employ anti-corrosive coating and dynamic seals in the new pumps, thus preventing erosion of the TMP and ensuring high reliability even for hard processes employing highly corrosive gases.
3. Low power consumption
The use of a newly developed power unit and high efficiency motor has enabled a 15% reduction (under conditions of zero load) in the power consumption compared to conventional turbo molecular pumps. This series of TMP have a low load impact on the environment.
Magnetic bearing type integrated turbo molecular pump specifications
TMP-X2905 series 5,100,000 JPY (excluding tax)
TMP-X3405 series 5,500,000 JPY (excluding tax)
TMP-X2905 series (VG250) f350 ´ H458 mm 115kg
TMP-X3405 series (VG300) f400 ´ H395 mm 89kg
The firm plans to sell 500 units of its TMP-X2905/X3405 in the first year.