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Veeco to ship first R&D MBE system to Oklahoma University

The GENxplor system will be used to grow III-V lasers, photo detectors, and solar cells

The University of Oklahoma will receive the first shipment of Veeco’s new GENxplor R&D MBE System early in the fourth quarter of 2013.

The GENxplor is a fully integrated deposition system that creates high quality epitaxial layers on substrates up to 3” in diameter and is ideal for cutting edge research on a wide variety of materials including GaAs, nitrides, and oxides.

“The University of Oklahoma is proud to be the first university in the world that will have the new GENxplor,” says Michael Santos, University of Oklahoma Professor in Engineering Physics.

“The proven growth chamber and enhanced features of the GENxplor, including robust process flexibility and convenient access to effusion cells, are ideal for the materials research we are conducting for technologies such as lasers, photo detectors, and solar cells. We have two other Veeco MBE systems in our lab that have performed very well,” Santos continues.

 “The University of Oklahoma is at the forefront of compound semiconductor materials research, so it is quite fitting that they are receiving the first GENxplor,” comments Jim Northup, Vice President, General Manager of Veeco’s MBE Operations. “It has been designed specifically for the R&D community, combining an easy to use platform with our world-class MBE performance.”

About GENxplor

Veeco's GENxplor features an efficient single frame design that combines all vacuum hardware with on-board electronics to make it up to 40 percent smaller than other MBE systems, saving valuable lab space. Because the manual system is integrated on a single frame, installation time is reduced.

The open architecture design of the GENxplor also improves ease-of-use, provides convenient access to effusion cells, and allows easier serviceability when compared to other MBE systems. Veeco says that when coupled with its recently introduced retractable sources, the GENxplor system represents the state-of-the-art in oxide materials research.

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