With EpiTriple TT and AbsoluT, temperature calibration of all three heating zones of an MOCVD showerhead reactor can be achieved

The precision of temperature measurements is crucial for a proper in-situ monitoring of epitaxial growth.


It is even more important if you measure temperature at different points on the same wafer, on different wafers or in different reactors simultaneously or if you compare the temperature of different runs.


Tony SpringThorpe of the National Research Council of Canada reported recently about fast and easy temperature calibration of all three heating zones of his showerhead reactor.


SpringThorpe uses LayTec’s AbsoluT for calibration of EpiTriple TT that monitors the growth of arsenide and phosphide based devices by three measurement heads at three different viewports.


AbsoluT sets up one exact reference point for pyrometry measurements at three viewports, where temperature variations are often caused by adjustment, window coating or manufacturing tolerances of the equipment.





AbsoluT attached to a showerhead reactor lid for calibration


SpringThorpe says, “AbsoluT is a quantum leap compared to the former calibration methods. It takes only five minutes to calibrate all three heads and requires no further calculation. Hence, I can take under real-time control all three heating zones. This helps enormously to grow uniform buffer and MQW structures. I am convinced that every MOCVD system should be equipped with AbsoluT."


 

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