The firm's semi-automated wet processing system will be used for 200 mm compound semiconductor wafers

MEI Wet Processing Systems and Services has received an order from a Taiwan based customer for its Advanced Etch Solution.

The tool is based on MEI's Revolution Wet Processing System, a semi-automated rotary wet processing system designed for batch wet processing (etch or solvent) for semiconductor and  MEMS (micro-electromechanical systems) applications. 



Semi-Auto Wet Processing for Semiconductors and MEMS

This shipment marks MEI's entrance into the Taiwanese market.

The Advanced Etch wet bench will be used for copper etch and titanium etch wet chemical processing of 200 mm compound semiconductor or MEMS wafers. 

"This is a prime example of the Advanced Etch applications market that MEI specialises in supporting," says Ed Jean, MEI's Sales Manager.

"Most wet process equipment suppliers tend to focus on either single wafer processing or generic equipment sales. There is a real need for semiconductor processing solutions that focus on challenging applications solutions, and MEI Wet Processing Systems and Services is meeting these specialised application needs, including proprietary Advanced Etch, Gold Etch, InGaP Etch and patented Metal Liftoff solutions."

Founded in 1990 and based in Albany, Oregon, MEI Wet Processing Systems and Services LLC, is a wet processing equipment and service company serving the semiconductor, MEMS, solar, and high technology industries.  

MEI's specialties include patented solutions for wet processing applications, automated and semi-automated wet process systems and services, linear and rotary wet benches for the semiconductor and material processing industries, automated chemical delivery systems and control automation software.

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