+44 (0)24 7671 8970
More publications     •     Advertise with us     •     Contact us
News Article

Shanghai University orders AIXTRON BM R&D reactor

Shanghai University Chooses AIXTRON for Graphene and Nanotube Processing

AIXTRON today announced that Shanghai University has ordered a BM R&D reactor to be used by its Sino-Sweden Microsystem Integration Technology Center (SMIT). AIXTRONs flexible R&D system for manufacturing carbon nanotubes and graphene has already shown excellent results at numerous customer sites worldwide.

Prof. Johan Liu, who is leading the graphene/nanotube research at SMIT, comments: “We will be launching extensive new research into the application of nanotubes and graphene using the BM capabilities in thermal- and plasma-based chemical vapor deposition. We chose the AIXTRON system as we achieved excellent results in our longstanding work with the BM reactor at Chalmers University in Sweden. The system has been a workhorse for similar research for the last five years, giving us consistently good results, high uptime, ease of use and process flexibility.”

Prof. Liu at SMIT will be developing next generation thermal interface/dissipating materials, heat spreaders, multi-chip interconnects and through silicon vias (TSV) for semiconductor chip packaging using the BM reactor.

The Sino-Sweden Microsystem Integration Technology Center (SMIT), a research facility established in 2003, combines expertise from Shanghai University and Chalmers University of Technology in Gothenburg (Sweden). Founded as a cross-border institution, the center conducts research on microsystem and microelectronics integration by focusing on new technology for future microsystems for industrial applications.

Chalmers University of Technology has extensive experience in the area of graphene research. The university is leading the EU’s Future Emerging Technology (FET) flagship project “Graphene”, in which AIXTRON plays a role in the “Graphene Flagship” research initiative by contributing its expertise to enable high quality large-scale graphene growth through the development of next generation deposition equipment.


Search the news archive

To close this popup you can press escape or click the close icon.
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.

Please subscribe me to:


You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in: