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Aerotech unveils small linear encoder precision stage

The system can be used for compound semiconductor characterisation
Aerotech’s  compact MPS75SLE linear positioning stage which travels to 100 mm, features smooth travel which combines accuracy, repeatability and positioning resolution capability to 25 nm.

Ideal applications include optics positioning, z-axis positioning of sensors in surface metrology, and in general purpose high-precision alignment.

One of its potentials is in semiconductor characterisation.

Quick and straightforward multi-axis configurations are made easily with other MPS linear and rotary stages using the adapter brackets and mounting compatibility inherent in the entire MPS stage family.

Precision Design for Precision Results

The precision ground, preloaded ball-screw coupled with a low thermal expansion linear encoder provides an accuracy of ± 0.75 µm and a repeatability of ± 0.1 µm. Anti-creep, crossed-roller bearings provide smooth travel and high-load capacity in a compact package.

The low thermal expansion (3.3 ppm/˚C) precision glass scale encoder results in high-accuracy and repeatable positioning over long periods of time. The linear encoder is available with amplified sine (1 Vpp) or 50 nm TTL digital outputs for easy integration with all standard controllers.

Highly Configurable for Flexibility

MPS75SLE motor options include a DC servomotor with a high-resolution rotary encoder or a stepper motor. Just like the MPS75SL, the SLE is available with and without optional bellows way covers. An optional mounting plate provides direct mounting to both English and metric optical breadboards, while the inherent mounting compatibility between all MPS stages results in simple development of multi-axis arrangements.
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