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New Swedish company to develop hot-wall CVD reactors

Advanced deposition equipment targets wide band gap semiconductor materials

Much of the pioneering research around silicon carbide was done at Linköping University in Sweden, where the highly successful hot-wall CVD reactor type was developed. The hot-wall CVD reactor has been the workhorse in R&D labs all over the world, and a large number of scientific papers have been published around material grown in them.

Now a new company, Epiluvac AB, has now entered the scene with the ambition to develop and supply this type of reactor. The company is based in the Ideon Science Park, Lund, Sweden, close to Lund University and the multi-disciplinary research centres ESS and Max IV. The Epiluvac team has many years of experience developing hot-wall systems.

"We are convinced that Epiluvac AB will be able to supply the best possible CVD tools to R&D labs around the world," says Bo Hammarlund, managing director of Epiluvac AB. "The system design during three decades has proven to meet the high expectations of the best researchers around the world."

"It is also our ambition to stay in close contact with our customers in order to customize the tools for the specific needs. We have a lot of experience in doing this. With the unique cluster of silicon carbide companies we have in Sweden, we are also able to pick up new demands at an early stage for not only SiC but also GaN, AlN, and graphene."

The hot-wall reactors have already proven to be successful tools for producing graphene. Epiluvac is one partner in the Strategic Innovation graphene program led by Chalmers University, Gothenburg.

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