Veeco introduces MOCVD platform for power GaN
System designed to speed transition from R&D to production
Veeco Instruments today introduced today the Propel GaN MOCVD system, which incorporates single-wafer reactor technology to aid film uniformity, yield and device performance. This new 200mm MOCVD system and technology enables the development of highly-efficient GaN-based power electronic devices that will accelerate the industry's transition from R&D to high volume production, says the company.
Veeco's new Propel Power GaN MOCVD system is designed specifically for the power electronics industry. Featuring a single-wafer 200mm reactor platform, capable of processing six and eight-inch wafers, the Propel Power GaN MOCVD system deposits high-quality GaN films that result in the production of highly-efficient power electronic devices.
The single-wafer reactor is based on Veeco's leading TurboDisc design with technology including the new IsoFlange and SymmHeat technologies that provide homogeneous laminar flow and uniform temperature profile across the entire wafer. Customers can transfer processes from Veeco K465i and MaxBright systems to the Propel Power GaN MOCVD platform.
"Leading power electronics manufacturers are currently progressing from R&D to pilot production, developing and qualifying novel device structures with a focus on improved reliability, yield and cost," said William J. Miller, executive vice president, Veeco. "With its superior design, technology and performance, Propel is a platform that will provide exciting future growth opportunities for our customers and for Veeco."
The Propel MOCVD system is based on Veeco's MOCVD TurboDisc technology and features long campaign runs and low particle defects. In addition, the proprietary SymmHeat technology drives uniform thermal control for good thickness and compositional uniformity. Providing a seamless wafer size transition, the system deposits high quality GaN epitaxial layers on silicon wafers that are six and eight inches in diameter.
"Beta testing by power electronics industry leaders has shown that the Propel system is ideally suited for fast cycles of learning with excellent particle performance," said Jim Jenson, senior vice president and general manager of Veeco MOCVD.
"This validation is great news for customers as they work to develop innovative processes and technologies for their product roadmaps. As we've demonstrated in the LED industry, Veeco's goal is to help power electronics customers also improve device efficiency, reduce manufacturing costs, and ultimately move into high-volume manufacturing."
