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EV Group Establishes Nanoimprint Lithography Centre For Photonics

Centre will assist customers using nanoimprint lithography for LEDs, photovoltaic cells and laser diodes

EV Group (EVG), a supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced that it has established a nanoimprint lithography (NIL) Photonics Competence Centre.

According to EV, the centre will assist customers using EVG's suite of NIL solutions to enable new and enhanced products and applications in the field of photonics. These include LEDs and photovoltaic cells, where NIL-enabled photonic structures can improve light extraction and light capturing, respectively, as well as laser diodes, where photonic structures enable the tailoring of device characteristics to improve performance.

The NILPhotonics Competence Centre includes dedicated, global process teams, pilot-line production facilities and services at its state-of-the-art cleanrooms at EVG's headquarters in Austria as well as its subsidiaries in North America and Japan.

"Nanoimprint lithography is an enabling technology for the design and manufacture of all kinds of photonic structures, which can significantly shorten time to market and lower cost of production compared to conventional technologies, such as electron-beam writing and stepper systems for optical lithography," stated Markus Wimplinger, corporate technology development and IP director at EV Group.

"For example, compared with conventional lithography, our full-wafer nanoimprinting technology can pattern true 3D structures in the sub-micron to nano-range as well as features as small as 20 nm, which opens up a range of new photonic applications. With our NILPhotonics Competence Centre, we're not just providing our customers with the most advanced NIL systems; we're also working closely with them during product development to help them determine how best to optimise their product designs and processes to take advantage of the resolution and cost-of-ownership benefits that NIL brings."

The new centre builds on more than 15 years of NIL experience at EVG with the largest installed base of NIL systems worldwide. EVG's NIL equipment portfolio includes the recently introduced EVG7200 UV-NIL system, which supports EVG's next-generation SmartNIL large-area soft NIL process for high-volume manufacturing. The EVG7200 with SmartNIL provides unmatched throughput and cost-of-ownership advantages over competing NIL approaches. 



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