Aixtron chooses Jordan Valley MOCVD Process Metrology
Jordan Valley, a supplier of X-ray based in-line metrology systems for advanced semiconductor manufacturers and equipment suppliers, today announced that it received an order for its QC3 High Resolution X-ray Diffraction (HRXRD) System for strain and thin films metrology from Aixtron R&D centre in the USA.
Jordan Valley QC3 and QC-Velox systems are metrology and characterisation tools for MOCVD Chamber qualification, used for epi growth of GaN and III-V semiconductors structures. Since the QC3 system introduction in 2010, it has become the tool of record for both production monitoring and advanced R&D in the areas of GaN based LED and other devices, according to the company. The system was ordered following a six month evaluation by Aixtron's US R&D Centre in Sunnyvale, California.
Isaac Mazor, Jordan Valley's CEO, said: "We are pleased to have been selected by MOCVD market leaders such as Aixtron to support their advanced metrology requirements. This selection represents the customer's confidence in Jordan Valley's ability to provide valuable metrology solutions for their demanding applications, trusting the first-principle X-ray based metrology."
The Jordan Valley QC3 provides advanced HRXRD metrology with high throughput and precision in a very compact package. "By choosing the Jordan Valley QC3 platform, Aixtron the German group's US-based affiliate, acknowledged the product robustness, performance and extendibility to future technology challenges. We believe that the Jordan Valley QC3 can be a strong contributor to the rapid and advanced deposition technology development," added Paul Ryan, JVUK manager.
