SemiTEq JSC enhances STE35 MBE system
SemiTEq JSC, a Russian equipment manufacturer, has released an improved version of its STE35 MBE system, which is designed for R&D activities and pilot production of epitaxial structures in 'lab-to-lab' mode in InAlGaAsSb/GaAs systems..
The basic configuration of STE35 for the growth of A3B5 materials on substrates up to a diameter of 100mm was developed in 2008. The new enhanced STE35 MBE system has been updated with a fundamentally new modernised growth chamber, according to the company.
It is designed to reduce the number of ports for supplying nitrogen - for ease of maintenance all are now all located on the lid of the chamber. The updated STE35 also increases the number of ports to install sources of materials, and reduces the need for a decompression chamber. There is also the possibility of complete visual control over the passage of technical processes by increasing the number of viewing windows, says SemiTeq.
The efficiency of consumption of liquid nitrogen has also been increased.
SemiTEq says that long-term operation testing in different conditions, as well as close cooperation with end-users, has allowed it to create the new design.
