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Plessey boosts LED production with AIX G5+C

Aixtron technology to expand 150mm processing and qualify 200mm GaN-on-Si

Aixtron, a provider of deposition equipment, has announced that Plessey Semiconductors has ordered an AIX G5+ C cluster system for the production capacity expansion of GaN LEDs manufactured on silicon wafers (GaN-on-Si). The tool is scheduled for delivery in the third quarter 2016.

The AIX G5+ C cluster for Plessey consists of two multi-wafer AIX G5+ reactors which are supplemented by Aixtron's next generation cassette-to cassette handler for large-scale, fully automated epitaxy production. Plessey purchased the Aixtron planetary system mainly for the expansion of its 150 mm GaN-on-Si wafer production but also works towards 200mm production qualification mid-term as Aixtron's G5+ system enables the processing of eight 150 mm wafers or five 200mm wafers at the same time.

Mike Snaith, operations director at Plessey, said: "We are now moving from proof of capability for our GaN-on-Si LED products into a capacity expansion phase. In the meantime, we have built significant demand for a range of our LED products. We have decided to purchase Aixtron's latest planetary system as the AIX G5+ C combines outstanding on-wafer uniformity and run-to-run performance at lowest cost of ownership - aspects that are crucial for efficient high-volume GaN-on-Si production."

Frank Schulte, VP Aixtron Europe, comments: "We have a longstanding and trustful relationship with Plessey and therefore, we are delighted by the renewed order. Our AIX G5+ C planetary system resolves the common challenges of high-yield, high-quality and high-throughput production of GaN-based materials on large-area silicon wafers through its fully automated cassette-to-cassette loader and a thermally activated gas etch of the MOCVD chamber."

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