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Hangzhou Liangdongxin Microelectronics Orders Ferrotec Evaporator

Auratus deposition process enhancement methodology to be used by new Chinese GaAs foundry 

Ferrotec has confirmed that a Temescal UEFC series evaporator, the first Auratus Enhanced system to be installed in China, will be delivered to Hangzhou Liangdongxin Microelectronics, a provider of GaAs foundry services. Ferrotec's Temescal evaporators are electron beam-based evaporative coating systems for metallisation and compound semiconductor manufacturing.

Hangzhou Liangdongxin Microelectronics was established by Hangzhou Li-On Microelectronics, a Chinese supplier of power semiconductors. Hangzhou Li-On was founded in 2002 with processing, quality and management technology transferred from On Semiconductor. In 2012, Li-On further expanded its brand by purchasing Sanyo's MOSFET product line. 

"With the growth of mobile devices in China and the expansion of IoT (Internet of Things), the demand for next generation of semiconductor devices based on the GaAs material is growing.To ensure the success of our new GaAs foundry, we need a tool that could deliver high production throughput, consistent process uniformity, and operational efficiency to minimise our total cost of ownership," said William Wang, COO of Liangdongxin.

 "After a rigorous evaluation process, we concluded that Ferrotec's Temescal UEFC system is the best evaporator in meeting our specifications for thickness, composition and particulate control and we look forward to the high performance devices we will be able to produce on this system."

Gregg Wallace, managing director of Temescal Systems at Ferrotec commented: "The Chinese government has committed to becoming more self-sufficient in the manufacturing of semiconductor devices, and Hangzhou Liangdongxin Microelectronics' new GaAs based foundry will enable the production of leading-edge devices that power mobile and IoT."

He added: "Ferrotec's Temescal UEFC evaporator is a workhorse in the production of compound semiconductor devices and our Auratus Deposition Process Enhancement Methodology delivers unmatched product quality and operating efficiency. We look forward to strong growth from Hangzhou Liangdongxin Microelectronics and this tool will be an exceptional fit with their expanding GaAs foundry business."



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