First order for Laytec EpiTT/VCSEL
VCSELs grown on GaAs are currently emerging as a leading technology in rapidly expanding markets like gesture recognition, 3D imaging, datacomm and others.
Following the request of customers and using the modular concept of its Gen3 in-situ platform, Laytec has customised and expanded the related in-situ metrology performance for VCSEL epitaxy.
In May, a leading European user placed the first order for such a system called EpiTT/VCSEL. The tool will be shipped at the beginning of 2017, according to the company.
EpiTT/VCSEL contains two fibre optical heads: one for a standard EpiTT (measures wafer temperature and growth rate) and one for spectral reflectance sensing (R- VCSEL). Both can be mounted via an adapter flange on an EpiCurve head making an EpiCurve TT/VCSEL system.This allows integrating the full EpiCurveTT performance with the spectral monitoring of DBR (distributed Bragg reflector) stop- bands and cavity dip position. EpiTT/VCSEL and EpiCurveTT/VCSEL are powered by new software modules that enable both single-pocket and multi-pocket operation.