+44 (0)24 7671 8970
More publications     •     Advertise with us     •     Contact us
News Article

Mass-Vac launches new vacuum pump inlet trap


High capacity trap removes contaminants from LPCVD, PECVD, MOCVD, HVPE, and ALD processes

Mass-Vac has introduced a high-capacity vacuum pump inlet trap designed to remove high quantities of contaminants from LPCVD, PECVD, MOCVD, HVPE, ALD and similar processes.

The MV Multi-Trap 16 inch trap features a stainless steel housing with a large knockdown stage and a large pleated filter made from high-temperature polyester to capture and retain large quantities of particulates. Offered in a single or stacked configuration, it is available with NW-40 to ISO-160 ports in straight-through and right angle configurations.

Providing a conductance of > 2000 CFM @ 1 TORR, the new inlet trap can be supplied with 25- and 100-micron polyester ratings. The single stage filter has a 40 sq. ft. surface area and the stacked version provides 80 sq. ft. and they trap 60 grams/sq. ft. of particulates.

A cooling option is offered for condensable materials.

Search the news archive

To close this popup you can press escape or click the close icon.
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.

Please subscribe me to:


You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in: