Riber launches new tool for mass epiwafer production
MBE 8000 offers twice the productivity of existing products
MBE firm Riber has announced the final qualification of its MBE 8000 production platform by leading US epiwafer manufacturer.
According to the company, the MBE 8000 delivers twice the productivity of existing products on the market while enabling outstanding performances. And the flexibility of the technology enables it to address all compound semiconductor growing markets from VCSEL, transistor, sensors requiring high level of performances in terms of uniformity, reproducibility, and stability.
This system is capable of growing batches of eight 150 mm (6 inches) or four 200 mm (8 inches) wafers, increasing capacity by 50 percent over the existing products. As cell design, system geometry, process control are identical, it ensures process transfer within a minimum of time and an easy handling for Riber machines operators.
The final qualification step has validated the MBE 8000 in terms of process, robustness, stability, ergonomics, and control. As an example, defect density over 30 runs measured is less than 50 particles per cm² measured on a VCSEL-type structure and on particles in the size of 0.8-8µm.
