DTU selects Samco plasma system for quantum research
Samco has announced that its plasma etching system, the RIE-400iP, has been selected by the Technical University of Denmark (DTU) for quantum photonics research. The system will be installed at DTU Nanolab, the university’s central nanofabrication facility, with shipment scheduled for mid-2026.
The RIE-400iP system will be used for etching of III-V semiconductor materials, with a particular focus on GaAs and AlGaAs. These material systems are central to DTU’s research on quantum photonic devices, including the development of single-photon sources for quantum computing and quantum communication applications.
The system was selected following a competitive evaluation process, and system production has recently commenced. The RIE-400iP offers advanced plasma etching performance with atomic-scale process control, supporting highly reproducible fabrication of nanostructures required for quantum photonics research. The tool will complement DTU Nanolab’s existing nanofabrication infrastructure and further strengthen its capabilities in compound semiconductor processing.
“The introduction of a plasma etching system with atomic-scale process control is an important step for our quantum photonics research,” said Battulga Munkhbat, associate professor in the Department of Electrical and Photonics Engineering at DTU. “Precise and low-damage etching of III-V materials such as GaAs and AlGaAs is critical for fabricating nanostructures used in single-photon sources. This system will strengthen our nanofabrication capabilities and support further advances in quantum device development.”
“We are honoured that DTU selected the RIE-400iP for this quantum photonics application,” said Tsukasa Kawabe, president and COO of Samco. “Atomic-scale control during plasma etching is becoming increasingly important for III-V device fabrication, particularly in quantum and photonic applications where process precision directly impacts device performance. Samco remains committed to advancing plasma processing technologies that support cutting-edge research worldwide.”
DTU Nanolab serves as Denmark’s national nanofabrication facility, supporting a wide range of academic and industrial research in nanotechnology, photonics, microelectronics, and quantum devices.
