Tegal Announces Order for 903e Diode Plasma Etch Tool
Tool Utilized for Advanced Telecommunications Process Applications
PETALUMA, CA. Tegal Corporation (NASDAQ NM: TGAL) today announced the order for a 903e diode plasma etch tool from a leading North American supplier of digital signal processors (DSPs). The tool will ship to this first-time Silicon Valley customer during the current quarter. The 903e diode plasma etcher will be used to process materials for telecommunications applications, specifically devices that convert analog signals to digital. The customer expects the 903e diode plasma etcher s yield enhancing processing capability and small footprint to play an important role in its manufacturing line.
"This sale is another win for Tegal in its quest to be a top supplier to manufacturers of high-speed telecommunications devices," said Jim McKibben, vice president of worldwide sales and marketing. "Market research shows that telecommunications devices will soon replace the PC as the volume driver for semiconductors. Our leading edge etch capabilities have been enabling productivity enhancements in the telecommunications industry for 15 years and will continue to do so as the industry expands."
The Tegal 903 is a versatile diode plasma etch tool designed around a production-proven transport system that can accommodate 75-150 mm round silicon and gallium arsenide (GaAs) substrates. The transport can also be configured to accommodate rectangular substrates from 100-125 mm on a side. Typical applications for the semiconductor industry include GaAs, III-V materials, pad etch, passivation etch, oxide/contact/via etch (down to 0.8 micron), LDD spacer etch, polyimide ILD etch, and resist/SOG planarization.
About Tegal Corporation
Tegal Corporation, headquartered in Petaluma, Calif., is a leading designer and manufacturer of plasma etch systems used in the production of integrated circuits (ICs), and related microelectronics devices. Etching is a key process and must be repeated multiple times in the production of these devices. Tegal markets and services its systems in all major IC-producing regions of the world. More information is available on the Internet at www.tegal.com.
About Tegal Corporation
Safe Harbor Statement
Except for historical information, the matters discussed in this news release are forward-looking statements. Such forward-looking statements are subject to certain risks and uncertainties including, but not limited to industry conditions, economic conditions, non-acceptance of new technologies, the growth of the wireless market, as well as other risks set forth in the Company s periodic filings with the Securities and Exchange Commission.
Contact:
Tegal Corp. David Curtis or Jim McKibben, 707/763-5600
or
The Loomis Group Inc. Gabrielle Svenning, 415/882-9494
gabrielle@loomisgroup.com
Tegal Corp. David Curtis or Jim McKibben, 707/763-5600
or
The Loomis Group Inc. Gabrielle Svenning, 415/882-9494
gabrielle@loomisgroup.com
E-mail: gabrielle@loomisgroup.com
Web site: http://www.tegal.com
