New Expansion of Epistar Corp.
5 New AIXTRON G3 Planetary Reactors
Aixtron, Gemany. Epistar Corp. and AIXTRON are pleased to announce that Epistar purchased 5 AIX 2400/2600G3 Planetary Reactors® for their new expansion scheme. The AIX 2400/2600G3 systems will be used for yellow, orange and red (AlInGaP) UHB-LED, as well as blue and green (III-Nitride) wafer manufacturing.
Dr. Jacob Tarn, Vice-President, who is responsible for the production of epitaxial wafers said: "The AIXTRON Planetary Reactor® concept is exclusively used for our AlInGaP UHB-LED wafer manufacturing. The G3 reactor with its increased capacity and increased efficiency is mandatory for low cost production and it will maintain Epistar s technological leadership. Also, the III-Nitride LED wafers at Epistar from AIXTRON Planetary Reactor® is producing industrial standard brightness with superior uniformity and best efficiencies."
The AIX 2400/2600G3 has a flexible design for up to 35x2 inch and 5x6 inch wafers. The two-flow horizontal Planetary Reactor® is recognized as the most widely used multiwafer MOCVD reactor for compound semiconductor applications. The reactor concept allows laminar gas flow without turbulences for precise control of the material composition and achievement of ultra-sharp interfaces. Ultra-high uniformity along with high growth efficiency on multiple 2, 3, 4 or 6 inch wafers is achieved through wafer rotation with the patented Gas Foil Rotation®.
AIXTRON has installed over 350 systems worldwide and is represented in over 15 countries. The company provides an extensive service and support network for maintenance as well as upgrading of its systems. Among AIXTRON s list of further industrial clients are names such as Agilent/LumiLeds (subsidiary of Hewlett Packard), Alcatel, Anritsu, AXT, Epistar, Epitronics, EPSON, IQE (EPI), Honeywell, JDS-Uniphase, ITT, Kopin, Lucent, Mitsubishi Electric, Motorola, NEC, Nortel, Osram, Samsung, Showa Denko, Sumitomo Electric, Thomson, UEC, VPEC and numerous Japanese corporations. AIXTRON systems have also been installed in many of the world s most renowned research institutes including JPL, Sandia Nat. Lab., Fraunhofer Institute, ITRI-OES, CNRS. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R&D projects with major partners worldwide.
Contact:
Octavia Schirmer
Marketing Manager
AIXTRON AG
Phone: +49 (241) 8909-474
Fax: +49 (241) 8909-40
E-mail: ocs@aixtron.com
Octavia Schirmer
Marketing Manager
AIXTRON AG
Phone: +49 (241) 8909-474
Fax: +49 (241) 8909-40
E-mail: ocs@aixtron.com
E-mail: ocs@aixtron.com
