Karl Suss Offers Film Thickness Metrology Tool
MUNICH, Germany. Karl Suss announced that it has begun offering a new product, called the KT-22, designed to allow precise, non-destructive measurement of film thicknesses. The KT-22 s capability to measure both thick and thin films allows it to be used in a wide range of applications. The system is capable of highly accurate, non-contact measurements of photoresist film thicknesses from 20 nanometers thru to 90 microns and greater.
Suss has an exclusive distribution agreement to market and sell the KT-22, designed and manufactured by Foothill Instruments, LLC of California, a manufacturer of film thickness metrology systems. The KT-22 can be used to measure non- or weakly- absorbing materials such as resists, oxides, nitrides and polysilicon on silicon, GaAs, metal, and other substrate materials.
Current technology on the market is primarily targeted at measuring very thin films such as gate oxides. These systems are generally incapable of measuring the thick films encountered in advanced packaging and MEMS applications, which require the ability to measure films which are orders of magnitude thicker than conventional films.
"We want to see our customers succeed. We do that by solving problems, developing innovative technology, and bringing new ideas to market," explained James Hermanowski, international product manager for Suss s Coating Business. "The KT-22 specifically addresses a market where no solution previously existed, thus eliminating another barrier in applications where thick resist processing is a requirement."
By offering the KT-22, Suss has a complete thick film package for its customers, including creating, processing and measuring thick films. The KT-22 complements the current Karl Suss thick film offerings, including the MA200 and MA150 proximity lithography systems and its ACS200 and Falcon cluster and track systems.
The KT-22 is a tabletop system not much larger than a PC, with a footprint of 0.75 meters deep by 0.9 meters wide. It incorporates innovative design features including a precision stage, built-in reference, network ready computer, and Wafermap(R) advanced mapping and statistical process control (SPC) software from Boin, GmbH. This software allows the user to quickly view, edit, and analyze measured data from the KT-22.
About Foothill Instruments
Foothill Instruments, LLC manufactures semi-automated and in-process film thickness metrology systems for semiconductor and related industries. For more information regarding the Foothill KT-22 measurement system, visit www.foothill-instruments.com.
About Karl Suss
Karl Suss is a global supplier of manufacturing equipment and process technology for the advanced packaging, MEMS and microelectronics markets. With over 6,000 systems installed, SUSS products include coating and developing systems, proximity lithography systems, substrate bonders, flip chip bonders and probe systems. Headquartered in Munich/Germany, Suss operates 9 manufacturing, sales and service centers in North America, Europe, Asia and Japan. To learn more about Karl Suss and its full line of products, please visit our web site at www.suss.com or www.suss.de.
SOURCE Karl Suss
CONTACT: James Hermanowski of Karl Suss America Inc., 802-244 5181, or fax, 802-244-5103, or jhermano@suss.com; or Steve Farnsworth of Mathews & Clark, 650-815-1006, or fax, 650-815-1095, or steve@mathewsandclark.com
Web site: http://www.foothill-instruments.com
Web site: http://www.suss.de
Web site: http://www.suss.com (SMIT)
James Hermanowski of Karl Suss America Inc., 802-244 5181, or fax,
802-244-5103, or jhermano@suss.com; or Steve Farnsworth of Mathews & Clark,
650-815-1006, or fax, 650-815-1095, or steve@mathewsandclark.com
Web site: http://www.foothill-instruments.com
Web site: http://www.suss.de
Web site: http://www.suss.com (SMIT)
E-mail: steve@mathewsandclark.com
Web site: http://www.suss.com
