Nanometrics Introduces NanoSpec 9100 Automated Film Metrology System; Advanced System Designed for Optical-Telecom and Wireless Communication Device Manufacturing
SUNNYVALE, Calif. Nanometrics, Inc. (Nasdaq:NANO), an industry leader in semiconductor metrology equipment, today unveiled the NanoSpec 9100, an automated, non-contact film metrology system designed to measure films on substrates used in wireless, optical telecommunication integrated circuit manufacturing and other semiconductor devices. The NanoSpec 9100 is the only standalone film metrology system currently available to the communication device market equipped with deep-ultraviolet (DUV) to near-infrared spectroscopic ellipsometry, DUV to visible reflectometry and Fourier transform infrared (FTIR) technology.
"The NanoSpec 9100 merges leading-edge measurement technology with an automation platform capable of handling wireless, optical telecommunication device substrates and materials, such as gallium arsenide and silicon germanium," said John Heaton, CEO of Nanometrics. "The system brings the latest advancements in optical metrology to the communication device market in order to analyze the advanced materials and processes used in manufacturing."
Advanced robotic automation allows for delicate wafer handling while offering high throughput. The layout of the system s software meets SEMI standard E95-0200, Specification for Human Interface for Semiconductor Manufacturing Equipment, which calls for a unified graphical user interface (GUI) that is easy to use and globally applicable. Based on Windows NT(R), the software also allows for seamless recipe transfer from the standalone system to Nanometrics Integrated Metrology platforms. In addition, the NanoSpec 9100 offers a new reflectometer with a wavelength range of 190-780 nm incorporating a cooled CCD array detector that provides excellent signal-to-noise ratio for improved measurement performance.
The NanoSpec 9100 will begin shipping in the third quarter of 2000. Nanometrics personnel will be available during the SEMICON West 2000 tradeshow in San Francisco July 10-12 at booth number 1501 to discuss the system in detail.
About Nanometrics, Inc.
Nanometrics, Inc. is a leading supplier of integrated and automated metrology equipment for advanced IC, flat panel display and magnetic head manufacturing. Nanometrics is traded on the Nasdaq National Market under the symbol NANO. The company s web site is http://www.nanometrics.com.
Note to Editors: NanoSpec(R) is a registered trademark and Integrated Metrology is a trademark of Nanometrics Inc. Windows NT(R) is a registered trademark of Microsoft Corporation.
The foregoing discussion includes forward-looking statements regarding Nanometrics manufacture and sale of products, the development of advanced models and the growth of the market for, and the success of, the product line. Actual results could differ and such differences could be material. Factors that could cause such differences include market demand for these products and the effect of competition, as well as Nanometrics ability to integrate the technology and to develop, manufacture, sell and service the products. Also see risk factors set forth in the Company s Forms 10K and 10Q filed with the Securities and Exchange Commission.
CONTACT: Nanometrics, Inc. Roger Ingalls, 408/746-1600 ext. 101 ringalls@nanometrics.com or The Loomis Group Clare Casey, 415/882-9494 clare@loomisgroup.com
Nanometrics, Inc.
Roger Ingalls, 408/746-1600 ext. 101
ringalls@nanometrics.com
or
The Loomis Group
Clare Casey, 415/882-9494
clare@loomisgroup.com
E-mail: clare@loomisgroup.com
Web site: http://www.nanometrics.com
