Tegal Introduces Next-Generation Successor To 900 Series Volume Etch Tools
i900 Series™ Enhanced PC-based logic increases wafer throughout and efficiency, improves cost of ownership
Petaluma, CA. Tegal Corporation (Nasdaq: TGAL) today unveiled the i900 Series System, the most advanced of the company s non-critical etch family of tools. Leveraging the advanced logic of Tegal s 6500 Series plasma etchers with the production-proven platform of the 900 Series, this evolutionary system is designed to increase the functionality, productivity and flexibility of Tegal s award-winning selection of volume etch solutions.
"For more than 15 years, Tegal customers have depended on the 900 Series of diode plasma etchers for superior etch results and the lowest cost of ownership (COO) in the industry. The added features of the i900 system will increase COO and efficiency through upgraded software capabilities while preserving the durability for which the tool is known," said Jim McKibben, vice president of worldwide marketing and sales for Tegal Corporation. "After careful research of our customers needs we believe we have developed the best, most advanced solution for their non-critical etch applications."
The i900 System features a new graphical interface (GUI) and touch screen as well as a PC-based operating system. The tool is capable of on-line and off-line data logging for analysis via CD, diskette and on screen diagnostics. Storage capacity is limited only by the user s hard drive potential. Other features include unlimited plasma recipes, improved transport through newly designed motor drivers and flexible software for future upgrades. Service and warranty standards for previous models apply across the board to the new platform and are supported by Tegal s award-winning worldwide service organization.
Tegal recently received the prestigious VLSI Research Inc 10 BEST Award in the category of Small Suppliers of Wafer Processing Equipment (sales under $300 million). This marks the fourth year the etch company has been recognized by VLSI Research Inc for superior customer satisfaction.
Tegal s 900 Series systems are widely recognized for low cost of ownership and high-throughput. Approximately 1,300 of the 900 Series systems have been installed around the world and are supported by an extensive worldwide parts and service organization. Adept at handling both round and square substrates, the 900 Series systems deliver highly reliable, repeatable results in etching a variety of films used to manufacture semiconductors, telecommunications and optoelectronic devices, flat panel displays and thin film magnetic heads. A working model of the i900 System will be made available to the public at SEMICON West 2000 in San Francisco, CA July 10-12. Customers and press are invited to visit the Tegal Corporation booth (#2216 South Hall) during the show.
About Tegal Corporation
Tegal Corporation, headquartered in Petaluma, Calif., is a leading designer and manufacturer of plasma etch systems used in the production of integrated circuits (ICs), opto-telecom devices and other related microelectronics devices. Etching is a key process and must be repeated multiple times in the production of these devices. Tegal markets and services its systems in all major IC-producing regions of the world. More information is available on the Internet at www.tegal.com.
Safe Harbor Statement
Except for historical information, matters discussed in this news release are forward-looking statements. Such forward-looking statements are subject to certain risks and uncertainties including, but not limited to industry conditions, economic conditions, acceptance of new technologies, the growth of the microcontroller market, customer acceptance for the i900 Series, and other risks set forth in the company s periodic filings with the Securities and Exchange Commission.
Contact: Jim McKibben VP Worldwide Sales and Marketing Tel: 707/763.5600 Fax: 707/765.9311 jmckibben@tegal.com or Gabrielle Svenning The Loomis Group, Inc Tel: 617/638.0022 Fax: 617/638.0033 gabrielle@loomisroup.com
Jim McKibben
VP Worldwide Sales and Marketing
Tel: 707/763.5600
Fax: 707/765.9311
jmckibben@tegal.com
or
Gabrielle Svenning
The Loomis Group, Inc
Tel: 617/638.0022
Fax: 617/638.0033
gabrielle@loomisroup.com
E-mail: gabrielle@loomisroup.com
Web site: http://www.tegal.com
