KDF Enhances 900 Series Platform With Introduction of Advanced 954 In-Line Batch Sputtering System
Source: KDF
Rockleigh, NJ. KDF Electronic and Vacuum Services, Inc., a leading supplier of new and remanufactured physical vapor deposition (PVD) in-line batch systems, today introduced the 954, an in-line batch sputtering system designed for processing Gallium Arsenide (GaAs) and other compound semiconductor applications. The tool augments KDF s 900 series product family, which currently includes the 903NT, 943NT and 944NT. The 954 is available in the standard 954NT configuration and as the 954NTX, which offers the option of extended cathodes and increased uniformity. The tool will begin shipping in the fourth quarter of 2000.
"The 954 demonstrates KDF s commitment to constantly provide new technology for our customers, particularly those focusing on GaAs and other compound semiconductor applications. A major benefit to those users is the no pressure holding feature, which ensures wafers don t break under the pressure of a clamp," said Kurt Flechsig, president of KDF. "Like our other systems, the 954 provides a cost-effective means for customers to upgrade to next-generation tools because it can be seamlessly integrated into existing production solutions."
The 954 is a four target batch sputtering system, offering a 12x12 substrate area and small footprint. Cathode and wafer orientations are horizontal in the 954, translating to gentle substrate fixturing for users. The palletized system offers dual-level hi-vacuum pumped loadlock and high-speed batch processing features. The 954 system allows for high utilization that increases both cost-effectiveness and productivity. In addition, the system has the capacity for high-rate DC magnetron sputtering and single or multiple pass deposition.
Developed specifically for GaAs and other compound semiconductor applications, the 954 can also be applied to the full-range of next generation microelectronic component manufacturing. KDF systems are used in the production of electronic devices across multiple markets.
About KDF Electronic & Vacuum Services, Inc.
KDF Electronic & Vacuum Services, Inc., produces original and remanufactured batch inline-sputtering tools for the mainstream silicon, emerging materials and flat-panel display markets. KDF systems are used in the production of semiconductors, photomasks, telecommunications networks, wireless circuits, gallium arsenide (GaAs), high density interconnect, sensors, opto-electronics, flat panel display and radio frequency power devices. KDF is located in Rockleigh, New Jersey, and has representatives in Europe, Japan, Taiwan, Singapore, Malaysia, China and Korea. www.kdf.com
Contact: The Loomis Group, Inc. Charla Jones Northeast Regional Director Tel: 617-638-0022 charla@loomisgroup.com or KDF Electronic & Vacuum Kurt Flechsig President Tel: 201-784-5005 kurt@kdf.com or Todd Plaisted Director of Sales and Marketing Tel: 201-784-5005 todd@kdf.com
The Loomis Group, Inc.
Charla Jones
Northeast Regional Director
Tel: 617-638-0022
charla@loomisgroup.com
or
KDF Electronic & Vacuum
Kurt Flechsig
President
Tel: 201-784-5005
kurt@kdf.com
or
Todd Plaisted
Director of Sales and Marketing
Tel: 201-784-5005
todd@kdf.com
E-mail: todd@kdf.com
Web site: http://www.kdf.com
