Tegal Announces Sale of Diode Plasma Etchers to M/A-COM
Source: Tegal
Multiple Plasma Etchers to be Shipped This Quarter
Petaluma, CA. Tegal Corporation (Nasdaq: TGAL) today announced an order for two Tegal 901G diode plasma etchers from M/A-COM, Inc., a leading manufacturer of semiconductor chips used in wireless communications applications. Installation of the 901G tools in M/A-COM s Roanoke, VA facility is scheduled for later this quarter.
"The Tegal 901G systems will be used to increase M/A-COM s GaAs wafer processing capacity," said Brook Raymond, principal engineer, M/A-COM. "We are expanding our operations etching capability to meet a significant increase in demand for M/A-COM products."
"M/A-COM has been a valuable Tegal customer for more than 10 years," said Jim McKibben, Tegal vice president of worldwide sales and marketing. "With rapid growth anticipated for the communications industry over the next several years, Tegal is excited to assist M/A-COM and other communications technology manufacturers with the high performance, quality cost-effective tools necessary to bring these technologies to market." McKibben noted that the sale marked the first time the company has sold tools to this particular M/A-COM manufacturing facility.
Communications was the fastest growing segment of the semiconductor industry from 1993-1999, according to IC Insights, a market research firm. IC Insights forecasts that communications will more than double in size from 1999 to 2003, growing by 24 percent annually. Wireless communications systems account for roughly 30 percent of the communications IC market.
The Tegal 901G diode plasma etcher is part of the 901 series configured specifically for GaAs applications. The system is designed around a production-proven transport system that can accommodate 75 mm to 150 mm round GaAs substrates. The system can also be configured to accommodate rectangular substrates from 100 mm to 125 mm on a side. Typical applications for the semiconductor industry include LOCOS nitride etch, nitride contact/via etch (GaAs), zero layer etch, backside etch, isotropic oxide etch, photoresist descum, non-critical polysilicon etch, and titanium/tantalum alloy etch. In general, the 901 is best suited for technology design rules down to 0.8 micron.
About M/A-COM
M/A-COM, Inc., is part of Tyco Electronics, one of the major business units of Tyco International Ltd. M/A-COM, which is headquartered in Lowell MA, is a leading supplier of radio frequency (RF) and microwave integrated circuits and IP Networks to the wireless telecommunications and defense-related industries. M/A-COM s products include semiconductor devices, RF integrated circuits, and RF, microwave and millimeter wave passive and control devices, antennas, subsystems and systems. Employing more than 4,200 people, M/A-COM has sales offices and manufacturing facilities worldwide.
About Tegal Corporation
Tegal Corporation, headquartered in Petaluma, Calif., is a leading designer and manufacturer of plasma etch systems used in the production of integrated circuits (ICs), opto-telecom devices and other related microelectronics devices. Tegal markets and services its systems in all major IC-producing regions of the world. Tegal was recently granted its fourth VLSI Research, Inc Ten BEST award in recognition of its superior customer support and service. More information is available on the Internet at www.tegal.com.
Safe Harbor Statement
Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project," or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the company s products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the company s periodic filings with the Securities and Exchange Commission.
Contact: Tegal Corporation Jim McKibben Tel: 707/763.5600 jmckibben@tegal.com or The Loomis Group, Inc. Gabrielle Svenning Tel: 617/638.0022 gabrielle@loomisgroup.com
Tegal Corporation
Jim McKibben
Tel: 707/763.5600
jmckibben@tegal.com
or
The Loomis Group, Inc.
Gabrielle Svenning
Tel: 617/638.0022
gabrielle@loomisgroup.com
E-mail: gabrielle@loomisgroup.com
Web site: http://www.tegal.com
