Microbar Patented EnChem Product Provides Breakthrough Wastewater Treatment Solutions
Source: Microbar
Sunnyvale, CA. Microbar, the leading independent supplier of chemical management systems to the global semiconductor industry, has been granted several new patents that support its EnChem™ product for wastewater management.
The EnChem wastewater management system utilizes innovative technology in a unique configuration to deliver performance levels for both current and envisioned regulatory requirements. With the advent of copper processing and other emerging technologies and with more stringent regulatory requirements, conventional wastewater treatment technology is facing unmet challenges. EnChem systems have been evaluated, qualified, and implemented at leading edge technology semiconductor facilities producing both silicon and GaAs devices.
The four new patents cover processes and the methodology for high flow removal of fluoride and silica impurities to low ppm levels from wastewater streams. EnChem technology provides reliable and automatic removal of a wide range of contaminants that include arsenic, copper, fluoride, and silica found in typical semiconductor processing streams.
"These new patents validate the unique performance capabilities of EnChem", stated Marc Van den Berg, vice president of engineering at Microbar. "As a single pass / low pressure / low cost of ownership system, EnChem delivers a unique solution for the treatment of suspended solids as well as heavy metals and fluoride for IC fabs and other industries", added Van den Berg.
For more information regarding the EnChem wastewater management product please contact Microbar at 408/541-1040.
About Microbar: Founded in 1991, Microbar designs, manufactures and markets safe, cost-effective chemical management systems for semiconductor fabrication processes. Enabling both bulk and point-of-use chemical delivery and collection / treatment, these systems address growing chemical management and environmental concerns in the fab for an ever-broadening array of processes. Current applications for the company s equipment include DUV photoresist processing, CMP materials, low-k materials, copper electroplating and their patented CMP wastewater treatment technology, EnChem. Headquartered in Sunnyvale, Calif., Microbar is a privately held company that has maintained a greater than 68 percent CAGR for the past three years. For additional information about Microbar visit our website at www.Microbar.com.
Contact: Microbar Incorporated Joe Curcio Tel: 408/542-9083 Fax: 408/541-9158 Email: jcurcio@microbar.com or Mello Communications Renee Robinett Tel: 650/638-0485 Fax: 650/638-0487 Email: melloco@pacbell.net
Microbar Incorporated
Joe Curcio
Tel: 408/542-9083
Fax: 408/541-9158
Email: jcurcio@microbar.com
or
Mello Communications
Renee Robinett
Tel: 650/638-0485
Fax: 650/638-0487
Email: melloco@pacbell.net
E-mail: melloco@pacbell.net
Web site: http://www.Microbar.com
