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News Article

L-Tech Corporation Introduces AVID, Vaporless Marangoni Drying of Advanced Technology Substrates

Source: L-Tech Corporation

Mountain View, CA. L-Tech Corporation today introduced at SEMICON Southwest in Austin, the all new AVID IPA drying system for semiconductor and flat panel display substrates. The AVID features all the process benefits of advanced Marangoni drying without the hazards and complexities of creating IPA vapor. The patented delivery system atomizes IPA (isopropyl alcohol) into microscopic liquid droplets, which effectively create the differential surface tension drying without the need for IPA heaters and cumbersome IPA vapor safety equipment.

The AVID system has been designed and optimized for silicon, gallium arsenide, and other III-V wafer drying applications. Ultra-high purity materials and an emphasis on particle performance at 0.16um(micron) particle size provide the extreme cleanliness required for today s quarter micron and smaller integrated circuit geometries. The AVID can dry silicon wafers up to 300 mm in size, III-V wafers to 150 mm and flat panel displays to one meter. The system can be integrated into a wet bench or used as a turnkey, point-of-use dryer.

What makes the AVID technology unique is the method by which the IPA film is created on the water surface. Rather than producing a vapor in typical ways and requiring it to condense on the wafers, AVID utilizes ultrasonic energy to atomize the IPA into micro-sized droplets directly above the water surface. This greatly simplifies the IPA delivery system and avoids the hazard potential of IPA vapor. The process is entirely motionless, there are no complex and expensive safety or IPA reclaim systems to employ, and the tool s simplicity allows AVID to be more reliable and more efficient with less maintenance.

The AVID FPD is designed for the unique needs of glass substrates used in manufacturing flat panel displays. Process chambers for the AVID FPD are sized to match the needs of the particular panel and lot size being processed. L-Tech is also developing single wafer processing units to clean and dry silicon wafers.
With excellent particle performance at 0.16um(micron) particle size and over 3000 hours MTBF, AVID is production ready for today s advanced drying requirements. Units are priced according to configuration and L-Tech has been shipping products since earlier this summer.

About L-Tech Corporation

L-Tech is a privately held manufacturer of capital equipment for the microelectronics industry. With its main R&D facility in Mountain View, L-Tech owns multiple technology patents and is an industry leader in chemi-acoustic applications. Additional information is available on L-Tech s Web site located at http://www.ltechcorp.com.

Contact: L-Tech Corp. Dave Peterson Tel: 650/903-0304 ext. 16 sales@ltechcorp.com or Kirkpatrick Communications Bruce Kirkpatrick Tel: 925/244-9100 brucekirk@kirk-com.com

 

L-Tech Corp.
Dave Peterson
Tel: 650/903-0304 ext. 16
sales@ltechcorp.com
or
Kirkpatrick Communications
Bruce Kirkpatrick
Tel: 925/244-9100
brucekirk@kirk-com.com
 
E-mail: brucekirk@kirk-com.com
Web site: http://www.ltechcorp.com
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