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News Article

Trikon Receives PVD Equipment Order From Anadigics For Gallium Arsenide Applications

Source: Trikon Technologie, Inc.

NEWPORT, United Kingdom. Trikon Technologies, Inc. (Nasdaq: TRKN), today announced an order for the Sigma( fxP( Physical Vapour Deposition (PVD) equipment from ANADIGICS Inc. (Nasdaq: ANAD), a leading supplier of wireless and broadband communications solutions.

ANADIGICS is a pioneer in the production of high-volume, high-performance, cost-effective gallium arsenide integrated circuits. ANADIGICS will use the Sigma(fxP) for both front- and backside metallization schemes at its state-of-the-art, 150-mm manufacturing facility in Warren, NJ.

"Trikon has an excellent reputation as a vendor of production equipment for compound devices," said Alex McCann, vice president of operations at ANADIGICS. "As a supplier to the highly competitive communications market, we require reliable equipment for high-volume manufacturing. The Sigma( fxP( will provide us with high-volume metallization capability needed for our current and future requirements."

"This sale represents significant market penetration for Trikon, and builds upon our reputation as a supplier of quality PVD equipment for both compound and silicon applications," said Scott Brown, Trikon s vice president for US operations. "Our equipment was purchased over fierce competition from multiple PVD vendors. We continue to win business in the rapidly growing compound semiconductor market by providing customers with the best package of benefits. Our production experience gained from supplying mainstream silicon markets has been adapted to gallium arsenide applications. Customers are assured of production-worthy equipment backed up by strong customer support."

Note to technical editors

The Sigma(fxP) was developed for high-volume silicon production in state-of-the-art DRAM and logic centers and currently runs more than 3,000 wafers per week per machine. The same system has been modified to meet the demands of gallium arsenide production without compromising the inherent reliability and automation characteristics of the tool. The Sigma(fxP) will be shipped to ANADIGICS with Trikon s cold electrostatic chuck for low-temperature, low-damage lift-off metallization. Its unique design enables superior clamping force, providing controlled wafer cooling and preventing resist reticulation. The chuck has the capability to clamp thinned substrates through insulating wafer carriers, enabling front- and backside processing to be performed in the same deposition module. The development of the new electrostatic chuck benefits gallium arsenide device production by minimizing breakages and improving cost-of-ownership.

About Trikon Technologies Trikon Technologies, Inc. offers a broad range of semiconductor processing equipment for silicon, compound device and optoelectronic production. Trikon has patents and patents pending on processes and equipment and continues to develop new, low-k chemistries and processes for advanced applications. Trikon has held ISO 9000 accreditation since 1994 and ISO 14001 since 1999. Trikon s Web site can be visited at www.trikon.com.

Trikon s III-V technology products include: Sigma(fxP) PVD. A PVD cluster system offering high throughput and reliability with advanced process modules for pre-plate seed and lift-off deposition processes including contact and interconnect seals.

Delta(201). A field-proven, single-wafer, single-chamber dielectric deposition system offering high-quality, low-damage dielectrics for passivation, insulation and lift-off applications in III-V devices.

Omega(PERIE) (medium density plasma) and ICP (high-density plasma). For a range of III-V etch applications including T -gates, gallium arsenide backside vias and InP optical waveguides and mirrors.

About ANADIGICS ANADIGICS (Nasdaq: ANAD) designs and manufactures radio frequency integrated circuit (RFIC) solutions for growing broadband and wireless communications markets. The company s innovative high-frequency RFICs enable manufacturers of communications equipment to enhance overall system performance, and reduce manufacturing cost and time to market. By utilizing state-of-the-art processes for its RFICs, ANADIGICS achieves the high-volume and cost-effective products required by leading companies in its targeted high-growth communications markets. ANADIGICS was the first GaAs IC manufacturer to receive ISO 9001 certification. For more information on ANADIGICS, visit the company s Web site at www.anadigics.com.

"Safe Harbor" Statement Under the Private Securities Litigation Act of 1995: This news release contains certain forward-looking statements. These forward-looking statements are subject to various risks and uncertainties that could cause results to differ materially, including, but not limited to, (1) that the semiconductor industry will experience conditions, such as changes in demand for various types of semiconductors, that will affect the demand for semiconductor production equipment and Trikon s products, (2) that Trikon will not adequately respond to technological developments impacting the semiconductor industry, and (3) market acceptance of Trikon s products will not be forthcoming. These factors are not intended to represent a complete list of all risks and uncertainties inherent in the Company s business, and should be read in conjunction with the more detailed cautionary statements included in the company s SEC reports, including, without limitation, its annual report on Form 10-K, quarterly reports on Form 10-Q and current reports on Form 8-K.

Corporate contact: Carl Brancher, Trikon Technologies Tel: +44 (0)1633 414111 carl.brancher@trikon.com US Investor Relations contact: Kelly Keisling, Golin/Harris Tel: 212 309 1436 kkeisling@golinharris.com US Media contact: Lon Margulies, G.S. Schwartz & Co. Inc. Tel: 212 725 4500 lmargulies@schwartz.com Press Relations contact: Karen Wright, Trikon Technologies Tel: +44 (0)1633 474569 karen.wright@trikon.com

 

Karen Wright, Trikon Technologies
Tel: +44 (0)1633 474569 karen.wright@trikon.com
 
E-mail: karen.wright@trikon.com
Web site: http://www.anadigics.com
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