BOC Coating Technology Receives Patent for Lite-Touch Clips
Clip Prevents Breakage of Compound Semiconductor Wafers
Fairfield, CA. U.S. Patent Number 6,287,385 has been awarded to BOC Coating Technology for its innovative design of a spring clip used on Temescal substrate fixtures. The clip design allows the use of lighter handling forces when working with the fragile substrates. According to Cris Kroneberger, inventor of the clip, "Our original challenge was to adapt fixturing for extremely "thinned" gallium arsenide (GaAs) wafers used for compound semiconductors. The new clip design decreases and distributes the contact force over a larger area, reducing the stress imparted to the substrate and the potential for failure."
Gregg Wallace, Temescal Business Manager, stated, "Cris efforts were so successful we realized the new clip was a better solution for all compound semiconductor substrate holders, which are used for delicate substrates such as GaAs and indium phosphide (InP). It is generally accepted that fractures in these more brittle substrates are initiated at points where flaws or damage to the crystal already exist. E-beam deposition fixtures traditionally have used stronger force wafer clips designed for the more robust silicon wafers, and thus have a higher probability of creating micro scratches whenever used. These new clips are much easier to use and provide a much lighter yet balanced and controlled contact force when in place. The resulting reduction in micro scratches provides users higher yields through all subsequent processing."
Temescal is known worldwide as a leader in thin-film deposition, and provides systems and components for coating challenges in semiconductor, optical and microelectronic applications. Temescal, part of BOC Coating Technology, is a member of The BOC Group, (NYSE: BOX), the worldwide gases, vacuum technologies and distribution services company with operations in more than 50 countries and sales last year of $5.8 billion. Further information on Temescal products is available at www.temescal.net or by contacting temescal.sales@ct.boc.com.
Press Contact:
Lynda Hayes
BOC Coating Technology
Tel: (707) 423-2608
Fax: (707) 425-1706
lynda.hayes@ct.boc.com
Lynda Hayes
BOC Coating Technology
Tel: (707) 423-2608
Fax: (707) 425-1706
lynda.hayes@ct.boc.com
E-mail: lynda.hayes@ct.boc.com
Web site: http://www.temescal.net
