Tegal Awarded Patent for Advanced Etching Method
Source: Tegal Corporation
Critical to Manufacturing Integrated Circuits, Magnetic Heads, Advanced Memory Devices and Compound Semiconductors
Petaluma, CA. Building on its substantial patent portfolio, Tegal Corporation (Nasdaq: tgal) today announced that it has been granted United States Patent, No. 6,287,975 for controlling critical dimensions in a broad spectrum of device types. The 975 patent was awarded for a novel method which exploits a masking material s natural properties while enabling the etching of the unique materials associated with the production of next generation devices such as MPUs, MRAM, DRAM, FeRAM, thin film heads, compound semiconductor devices and system-on-a-chip products.
The patented method takes advantage of the masking material s reaction with the plasma during the etching process steps required to manufacture sub 0.13 micron devices. This method can be applied to any of the materials used in the manufacture of ICs, thin film heads, advanced memory devices and compound semiconductor devices. The 975 patent leverages the Tegal 6500 series system and process architectures to deliver the pattern fidelity and critical dimension control needed in the manufacture of these fine feature devices. ``Critical dimension control is essential when producing sub 0.13 micron devices. This patent enables the active management of the material transport processes that effect the final profile and critical dimensions on devices during etch, said Steve DeOrnellas, chief technical officer and vice president of Tegal.
By using the method of the 975 patent our customers can develop the robust next generation processes required for a broad array of next generation of device types. We also believe this patent strengthens Tegal s position in its chosen markets and represents a barrier to others attempting to use these materials to manufacture many different types of devices.
The 975 patent has been filed globally under the Patent Cooperation Treaty which can extend Tegal s patent coverage worldwide. The 975 patent, Tegal s existing portfolio, and our aggressive patent application pipeline allow us to further Tegal s well known technical edge which differentiates us from our competitors, said Mike Parodi, Tegal s chairman, president and CEO. We continue to expand our global patent portfolio and strengthen what is regarded as a key asset of the company so that we can leverage that differentiation during the next industry upcycle.
About Tegal Corporation Tegal Corporation, headquartered in Petaluma, Calif., is a leading designer and manufacturer of plasma etch systems used in the production of opto-telecom devices, integrated circuits (IC s), and related microelectronics devices. Etching is a key process and must be repeated multiple times in the production of these devices. Tegal markets and services its systems in all major IC-producing regions of the world. More information is available on the Internet at www.tegal.com.
Safe Harbor Statement Except for historical information, the matters discussed in this news release are forward-looking statements. Such forward-looking statements are subject to certain risks and uncertainties including, but not limited to industry conditions, economic conditions, non-acceptance of new technologies, as well as other risks set forth in the Company s periodic filings with the Securities and Exchange Commission.
Contact: Tegal Corporation, Petaluma Steve DeOrnellas Tel: 707/763-5600 (VP Technology and CTO) sdeornellas@tegal.com or The Loomis Group Megan Goodson, Tel: 415/882-9494 goodsonm@loomisgroup.com
Tegal Corporation, PetalumaSteve DeOrnellas
Tel: 707/763-5600 (VP Technology and CTO)
sdeornellas@tegal.com
or
The Loomis Group
Megan Goodson,
Tel: 415/882-9494
goodsonm@loomisgroup.com
E-mail: goodsonm@loomisgroup.com
Web site: http://www.tegal.com
