Thales orders AIXTRON MOCVD System for HBT production
Aachen, Germany. Thales (France), formerly Thomson - CSF, has recently decided to order their first multi-wafer production MOCVD equipment from AIXTRON. The AIX 2400/2600 G3 system is in fact their third purchase, having already installed AIXTRON reactors for InP/GaInAsP and GaN growth with a smaller capacity. The new MOCVD tool will be used for the growth of various types of HBT structures for Microwave Power Devices. Thanks to the unique and flexible nature of its design, the AIX 2400/2600G3 can successfully grow dilute nitride materials (GaInAsN). Although initially planned for 4" processes, this matchless system can be upgraded to a multiple 6" equipment tool at any time.
A spokesperson for Thales, Dr. Marie-Antoinette di Forte-Poisson, a well known MOVPE scientist comments "Based on our experience with our current AIXTRON MOCVD systems, we are convinced that the AIXTRON Planetary Reactorsâ are appropriate systems for obtaining highest quality material at high yield, reproducibility and low operation costs. The newly purchased system which is scheduled for delivery in Autumn 2001 will be a significant milestone in our R&D programs".
The many advantages of the AIXTRON Planetary Reactorsâ are well known world-wide. In addition to their user friendly operation and excellent process stability, the planetary principle combines successfully very high precursor efficiencies with world best uniformities. Together with excellent reliability and high throughput, all these properties lead to a valuable device yield.
With an installed base of well over 500 systems world-wide, AIXTRON is represented in over 15 countries. The company provides an extensive service and support network for maintenance as well as upgrading of systems. The high level of AIXTRON s service and the close relationship with its stakeholders is reflected in the VLSI Research Inc s Customer Satisfaction Survey, in which AIXTRON was once more among the 2001 10 BEST in its category and by the inclusion of the AIXTRON s shares in the Dow Jones Sustainability Index World. Among AIXTRON s list of industrial clients are names such as Agere, Alcatel, Anritsu, ATMI, Avalon, AXT, Epistar, EPSON, Honeywell, IQE, ITT, JDS-Uniphase, Kopin, LumiLeds, Mitsubishi, Motorola, Nortel, Optospeed, Osram, Procomp, Samsung, Siemens, Showa Denko, Sumitomo, Thales, UEC, VPEC and numerous Japanese corporations. AIXTRON systems have also been installed in many of the world s most renowned research institutes including JPL, Sandia Nat. Lab., Fraunhofer Institute, ITRI-OES, Research Center Jülich, CNRS. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R&D projects with major partners world-wide.
Contact: Dr. Claus Ehrenbeck Tel: +49 241 8909 444 Fax: +49 241 8909 145 C.Ehrenbeck@aixtron.com
Dr. Claus EhrenbeckTel: +49 241 8909 444
Fax: +49 241 8909 145
C.Ehrenbeck@aixtron.com
E-mail: C.Ehrenbeck@aixtron.com
