Sterling Semiconductor placed order for second EPIGRESS SiC CVD System
LUND, Sweden. EPIGRESS AB, a member of the AIXTRON group, today announced the sale of a second EPIGRESS SiC CVD System to Sterling Semiconductor in Tampa, Florida, USA.
In addition to the VP2000 SiC Planetary Reactorâ for SiC large scale production applications, with the newest order, Sterling particularly expands the epi-capacity for R&D and Pre-Production qualification purposes employing EPIGRESS VP508 GFRâ Hot-Wall SiC CVD system. This system represents the latest development of the VP508 series and features the unique combination of the SiC CVD Hot-Wall Reactor Design and the Gas Foil Rotationâ principle of the substrate(s). The system provides maximum flexibility ranging from 3x2" to single 3" and 4" wafers capacity. The Gas Foil Rotationâ feature which is also used in the Planetary Reactorâ ensures highest uniformity and reproducibility of layer characteristic on wafer and from wafer-to-wafer.
EPIGRESS is the leading supplier of SiC CVD equipment with numerous renowned universities and industrial customers worldwide such as Linköping University, IKZ Berlin, CEA LETI Grenoble, ACREO Kista, Purdue University, Northrop Grumman, Sterling Semiconductor, SiCED, Okmetic and numerous Japanese universities and corporations. The company provides an extensive worldwide service and support network for maintenance as well as upgrading of its systems through AIXTRON s Global Service Organization.
Sterling Semiconductor is a leading producer of SiC substrates, epitaxial thin films on SiC substrates, and is developing SiC devices for wireless communications, industrial process control and power amplification applications. A wholly owned subsidiary of Uniroyal Technology Corporation, Sterling has facilities in Sterling, Virginia, Danbury, Connecticut and Tampa, Florida. Uniroyal s optoelectronics division manufactures high brightness light emitting diodes (LEDs) at its facility in Tampa.
For more information about EPIGRESS AB, our CVD systems and services, please contact us directly or visit our homepage at www.epigress.com
Contact: Göran Berg Marketing & Sales Tel: +46 46 286 89 80 Fax: +46 46 286 89 89 info@epigress.se
Göran BergMarketing & Sales
Tel: +46 46 286 89 80
Fax: +46 46 286 89 89
info@epigress.se
E-mail: info@epigress.se
Web site: http://www.epigress.com
