Okmetic and Epigress starting a Silicon Carbide (SiC) Epitaxy collaboration
Okmetic orders Epigress systems for SiC Epi and Substrate Production
29 October, 2001
OKMETIC AB, a member of OKMETIC group and EPIGRESS AB, a member of the AIXTRON group today announced the establishment of a collaboration in the field of developing advanced SiC epi-production process technologies.
In conjunction with this collaboration agreement, EPIGRESS also announced the sale of a VP508 Gas Foil Rotation® system to OKMETIC. This SiC Hot-Wall CVD System represents the latest development of the unique EPIGRESS VP508 Hot-Wall design in combination with the AIXTRON patented Gas Foil Rotationâ principle. The system capacity is flexible and ranges from 3x2" to single 3" and 4" wafers.
Okmetic has developed a radically new method for SiC crystal growth, jointly with Linköping University and ABB Corporate Research. The method is based on the HTCVD technique, enabling for example, the growth of semi-insulating SiC substrates of very high purity. The first results from devices processed on Okmetic material were presented last year. Okmetic has also started to supply CVD-grown epitaxial layers. Okmetic has now started the industrialization of its SiC substrate and epitaxy business, which is expected to represent a significant business potential for Okmetic. Currently Okmetic AB employes ca. 15 people.
The parties announce that Okmetic has also ordered the first ever VP508HT production system from Epigress. This SiC crystal growth reactor is based on the High Temperature CVD (HTCVD) technique developed by Okmetic. The system will be used for doped and semi-insulating SiC substrate production in the Okmetic facility in Linköping, Sweden.
EPIGRESS is the leading supplier of SiC CVD equipment with numerous renowned universities and industrial customers worldwide such as Linköping University, IKZ Berlin, CEA LETI Grenoble, ACREO Kista, Purdue University, Northrop Grumman, Okmetic, Sterling Semiconductors, SiCED and numerous Japanese universities and corporations. The company provides an extensive worldwide service and support network for maintenance as well as upgrading of its systems through AIXTRON s Global Service Organization.
Okmetic is a rapidly growing high-tech company which manufactures high-quality silicon wafers and other products based on silicon, and markets these products to semiconductor and sensor industries world-wide. The company has business is based on customer satisfaction and the high quality of products and OKM. More information on the Company is available at Okmetic s renewed home pages at http://www.okmetic.com.
Contact: Dr. Claus Ehrenbeck Aixtron AG Tel: +49 241 8909 444 Fax: +49 241 8909 445 C.Ehrenbeck@aixtron.com
Dr. Claus EhrenbeckAixtron AG
Tel: +49 241 8909 444
Fax: +49 241 8909 445
C.Ehrenbeck@aixtron.com
E-mail: C.Ehrenbeck@aixtron.com
Web site: http://www.okmetic.com
