News Article
TRW purchases Unaxis etch system for InP fab
St. Petersburg, Florida. Unaxis USA, Inc., a leading supplier of plasma processing equipment for the worldwide semiconductor industry, announced today that TRW (NYSE:TRW) has placed a multimillion dollar, multiple system order for Unaxis’ VERSALOCK™ advanced InP etch system. Shipment of the VERSALOCK™ systems is scheduled to take place throughout 2002 to TRW’s indium phosphide wafer fab located in Redondo Beach, California.
Unaxis was awarded the order for its volume production etching systems based upon etch technology proven in TRW pilot line applications and TRW’s need for proven low cost of ownership manufacturing solutions.
Brian Chisholm, Vice President and General Manager of Unaxis’ Compound Semiconductor Strategic Business Unit, said “in addition to providing efficient and reliable equipment, Unaxis is committed to supporting TRW with advanced process solutions and ongoing process development capability.” He continued, “Unaxis is currently the world’s leading supplier of compound semiconductor etch technology, and we are confident of our ability to maintain that leadership position. Due to the fact that indium-containing etch by-products tend to be non-volatile, the TRW etch application presented some challenging technical hurdles that would significantly impact cost of ownership in volume manufacturing. We are delighted that TRW has chosen our InP etch solution.”
With a worldwide installed base of more than two hundred systems, the VERSALOCK™ is field proven in compound semiconductor, magneto-electronic, and photomask production applications. It features up to 3 process modules that can be configured serially for sequential, in situ process applications or in parallel for the highest throughput. VERSALOCK™ process modules are available either as single wafer or multi wafer batch. The modules support a broad spectrum of etch and deposition applications with reactive ion etch, plasma enhanced chemical vapor deposition, and high-density inductively coupled plasma technologies.
Unaxis is a leading global provider of manufacturing systems, components and services for selected information technology markets - such as semiconductors, data storage, flat-panel displays and optical components. In addition to the IT Segment, Unaxis is also a leader in the Segment Surface Technology and Components and Special Systems.
Unaxis Semiconductors
Unaxis Balzers Limited
Juerg Steinmann
Tel. +423 388 45 15
Fax: +423 388 65 39
Unaxis Investor Relations
Philipp Gamper
Tel. +41 1 360 96 22
Fax: +41 1 363 72 60
Email: philipp.gamper@unaxis.com
E-mail: juerg.steinmann@unaxis.com
Web site: http://www.semiconductors.unaxis.com
Unaxis Balzers Limited
Juerg Steinmann
Tel. +423 388 45 15
Fax: +423 388 65 39
Unaxis Investor Relations
Philipp Gamper
Tel. +41 1 360 96 22
Fax: +41 1 363 72 60
Email: philipp.gamper@unaxis.com
E-mail: juerg.steinmann@unaxis.com
Web site: http://www.semiconductors.unaxis.com
