Technical Insight
Anadigics Buys Trikon Metallization System (Materials and Equipment)
Anadigics has placed an order for Trikon s Sigma fxP PVD system, to be used for both front and backside metallization schemes at Anadigics 6-inch manufacturing facility in Warren, NJ. Developed for high-volume Si production with a capacity for more than 3,000 wafers per week, the Sigma fxP system has been modified to meet the demands of GaAs production. The metallization system will also be shipped with Trikon s cold electrostatic chuck for low-temperature, low damage lift-off metallization.
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