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Technical Insight

Equipment orders in brief (Materials and Equipment)

Sunday 1st April 2001

  • MBE Technology Pte has placed an order for two Riber reactors: one MBE6000 (4 6 inch) and one MBE7000 (7 6 inch). Three multiwafer systems are already in production at MBE Technology s facility in the Singapore Science Park. To date, seven of Riber s new 7 6 inch systems have been ordered by major foundries worldwide.
  • Tegal has received a repeat order from a leading North American supplier of high-performance broadband networks for a 6520 high-density plasma etch system. Scheduled for installation in June 2001, the system will be used for HBT/HEMT gate mesa and recess etch as well as other compound semiconductor device etching processes.
  • KDF has received an order for three in-line sputtering tools from a major supplier of components to the fiber-optic communications industry.
  • Munich-based Karl Suss has received multiple orders for its recently introduced M6000L metal lift-off cluster system (see Product Showcase) from a North American GaAs wafer fab.
  • Ultratech Stepper has received an order from Branchy Technology of Taiwan for a photolithography tool that will be used to manufacture GaAs components, in particular SAW filters.
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