News Article
Veeco launch system for point-of-use gas mixing
Apex gas mixing system has been designed to reduce costs by allowing dilution at point of use
Veeco's Apex Gas Mixing System has been designed to address key issues facing semiconductor manufacturers and foundries - material costs, process repeatability and system up-time.
Veeco say the Apex allows manufacturers to reduce costs by purchasing lower-cost, higher-concentration gases then diluting at the point of use. Depending on the concentrations and quantities needed, this could translate to cost savings.
Built around Veeco's Piezocon Gas Concentration Sensor, Apex system provides real-time process repeatability. The precise control of the gas concentration allows the Apex system to drive greater tool up-time by eliminating the need to re-qualify the tool after every gas cylinder change, reducing - and sometimes eliminating - tool down-time due to routine cylinder changes.
The system is suitable for applications requiring low concentration, high precision and cost sensitive gas mixtures and Improves repeatability by 10x or more when compared to individual gas cylinders Veeco believe.
Veeco say the Apex allows manufacturers to reduce costs by purchasing lower-cost, higher-concentration gases then diluting at the point of use. Depending on the concentrations and quantities needed, this could translate to cost savings.
Built around Veeco's Piezocon Gas Concentration Sensor, Apex system provides real-time process repeatability. The precise control of the gas concentration allows the Apex system to drive greater tool up-time by eliminating the need to re-qualify the tool after every gas cylinder change, reducing - and sometimes eliminating - tool down-time due to routine cylinder changes.
The system is suitable for applications requiring low concentration, high precision and cost sensitive gas mixtures and Improves repeatability by 10x or more when compared to individual gas cylinders Veeco believe.
