+44 (0)24 7671 8970
More publications     •     Advertise with us     •     Contact us
News Article

Aixtron launches compact platform for GaN devices


New G10-GaN cluster tool targets high-volume manufacturing of GaN-based power and RF devices

Deposition equipment specialist Aixtron SE has launched a new compact cluster solution for GaN based power and RF devices. The G10-GaN is currently being presented at SEMICON Taiwan in Taipei.

“We are proud that our new G10-GaN platform has already been qualified for volume production of GaN power devices by a leading US device manufacturer. The new platform delivers twice the productivity per cleanroom area than our previous product while enabling a new level of material uniformities, unlocking new levers of competitiveness for our customers,” says Felix Grawert, CEO and president of Aixtron SE.

Packed in a new, compact layout to take advantage of the smallest cleanroom space, the platform is said to feature novel reactor inlets, improving material uniformity by a factor of two for optimum device yields. On-board sensors are complemented by a new software suite and fingerprint solutions to ensure the system consistently delivers the same performance run after run, between maintenance for all process modules – extending the equipment uptime by more than 5 percent compared to the previous generation.

The cluster can be equipped with up to three process modules, delivering a capacity of 15x200 mm wafers thanks to Planetary batch reactor technology – enabling a 25 percent cost reduction per wafer compared to previous products, according to the company.

Search the news archive

To close this popup you can press escape or click the close icon.
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.

Please subscribe me to:


You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in: