Brooks introduces high temp mass flow controllers
MFCs can operate up to 150°C to support precursors for critical processes such as selective ALD
Brooks Instrument has released its new GF120xHT series high-temperature of thermal mass flow controllers. This is the company’s first high-temperature mass flow controller in the GF family and is specifically designed to support precursors required in semiconductor manufacturing including liquid precursors for compound semiconductors.
The GF120xHT series MFC flow module can operate between 45°C and 150°C. In comparison, traditional thermal MFCs can only operate up to 50°C. By offering a greater operating range than conventional thermal MFCs, Brooks says the new series can precisely deliver vapour to the process chamber, even when that material is a liquid or a solid at room temperature.
“Our high-temperature GF120xHT MFC will solve customer pain points by delivering precursors for critical processes, such as selective atomic layer deposition (ALD),” said Mohamed Saleem, chief technology officer, semiconductor platform, at ITW, the parent company of Brooks Instrument. “The GF120xHT will deliver these critical precursors reliably, accurately and without particle contamination.”
