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RIber reveals hybrid quantum platform

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Company says platform will drive significant improvements in material quality, growth control and transfer operations

Riber has released details of a hybrid quantum platform designed to meet the demands of research groups working on qubits.

The company says the platform will drive significant improvements in material quality, growth control and transfer operations, paving the way for new developments in the emerging quantum field.

For the controlled growth of III-V heterostructures, MBE is the optimal technique. To enhance electron mobility, Riber integrates comprehensive equipment along with advanced real time in situ measurements via its EZ Instruments, which provide direct feedback to refine growth recipes as needed.

The platform also includes an independent hydrogen cleaning chamber, essential for the effective desorption of native oxides on the substrate. All chambers are directly connected to the cluster, enabling full automation of the process.

To separate the III-V process line, an additional cluster can be linked to the primary one, designed specifically for low-temperature superconductor growth and equipped with an oxidation chamber. There is a low-temperature chamber that enables the deposition of a thin layer of aluminium and other superconductors at a wafer temperature of 123K, with wafer rotation.

A quartz crystal microbalance enables precise growth monitoring, once calibrated, while wafer temperature is measured using Riber's EZ-Edge Band-edge thermometry instrument. Immediately following the aluminium evaporation, the aluminium surface undergoes oxidation to stabilised. The dedicated oxygen chamber, independently attached to the cluster, allows for a rapid, reproducible oxidation process, according to Riber.

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