EPFL Purchases AIX 200 for Research on Low Dimensional Structures and Lasers
AIXTRON is pleased to announce that the Ecole Polytechnique Fédérale de Lausanne (EPFL), Switzerland, has ordered an AIX 200 MOCVD reactor for growth of GaAs and InP based materials. The EPFL will use the reactor for research on low dimensional quantum nanostructures and various laser devices.
For high flexibility the MOCVD system is set up for a future upgrade with a second reactor (AIX 200/4). Prof. Eli Kapon, head of the Nanostructures group at the Institute for Micro- and Optoelectronics (IMO) of EPFL, states: "We have decided for the AIXTRON reactor with in situ monitoring because it offers the highest flexibility together with an excellent growth performance. Additionally the Network of AIXcellence guarantees best support by means of technology transfer and service."
The AIXTRON reactor design is based on a tube reactor with pure laminar horizontal flow. This guarantees excellent wafer uniformity with very high efficiency in the use of process gases. Furthermore, the reactor is equipped with in situ monitoring for growth studies.
AIXTRON offers a wide range of epitaxial systems for MOVPE, VPE and LPE from R&D-oriented systems up to large-scale Planetary Reactor® production systems for up to 25x4 inch or 9x6 inch wafers. The company has installed over 300 systems worldwide, provides an extensive service and support network for maintenance and upgrading and is represented in over 15 countries.
Among AIXTRON s list of further industrial clients are names such as Agilent (former Hewlett Packard), Alcatel, Conexant, Epistar, Epitronics, Epson, IQE (EPI), Honeywell, ITT, Kopin, Lucent, Motorola, NEC, Osram, Samsung, Showa Denko, UEC, Uniphase, VPEC and numerous Japanese corporations. AIXTRON systems have also been installed in many of the world s most renowned research institutes including JPL, Sandia Nat. Lab., Fraunhofer Institute, ITRI-OES, CNRS. AIXTRON is very active in advancing MOCVD technology through collaborations and joint R&D projects with major partners worldwide.
Octavia Schirmer
Marketing Manager
AIXTRON AG
Kackertstr. 15-17
52072 Aachen
Germany
Phone: +49 (241) 8909-474
Fax: +49 (241) 8909-40
E-mail: ocs@aixtron.com
E-mail: ocs@aixtron.com
