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News Article

Tegal Receives Follow On Order From Winbond Electronics Corporation

Etch Company s Core Product Line Considered Essential for Customer s Increased Production Needs

Petaluma, CA. Tegal Corporation (Nasdaq:TGAL) today announced that it has received a follow on order for multiple Tegal 903 diode etch tools from Winbond Electronics Corporation, an IC manufacturer and information technology company based in Taiwan. The order, scheduled to ship in the next quarter, is worth nearly $800,000.

Winbond is adding the 903 diode etch tools as part of a capacity expansion program at its Hsin-Chu,Taiwan fab. The tools will be used in the production of memory chips, data communication ICs, microcontrollers, multimedia ICs, and other semiconductors.

"We depend on the reliability and efficiency of our capital equipment to broaden our reputation as a world-class company and technology leader with international management capability," said Mr. Jia-Wei Ma, etch module manager for Winbond. "Tegal has consistently provided us with superior plasma etch tools, which makes them the logical supplier of choice as we look to increase capacity." "This order provides strong evidence that customers value the consistent quality of performance of Tegal s core products," said Jim McKibben, vice president of worldwide marketing and sales. "It is a testament to Tegal s reliable technology.

"It is also a validation of the high quality and dependability of the global support and service network available to Tegal customers." Tegal scored the highest among all etch equipment suppliers for two consecutive years in the annual 10 BEST survey conducted by VLSI Research. The Tegal 903 is a diode plasma etch tool designed around a production-proven transport system that can accommodate 75-150 mm round silicon and GaAs substrates. The transport can also be configured to accommodate rectangular substrates from 100-125 mm on a side. Typical applications for the semiconductor industry include pad passivation etch, oxide contact/via etch (down to 0.8 micron), LDD spacer etch, polyimide ILD etch, and resist/SOG planarization.

About Tegal Corporation

Tegal Corporation, headquartered in Petaluma, Calif., is a leading designer and manufacturer of plasma etch systems used in the production of integrated circuits (ICs), and related microelectronics devices. Etching is a key process and must be repeated multiple times in the production of these devices. Tegal markets and services its systems in all major IC-producing regions of the world. More information is available on the Internet at www.tegal.com.

About Tegal Corporation Safe Harbor Statement

Except for historical information, the matters discussed in this news release are forward-looking statements. Such forward-looking statements are subject to certain risks and uncertainties including, but not limited to industry conditions, economic conditions, acceptance of new technologies, the growth of the wireless market, as well as other risks set forth in the Company s periodic filings with the Securities and Exchange Commission.

Contact: Tegal Corporation Jim McKibben, 707/763.5600 jmckibben@tegal.com or The Loomis Group, Inc. Gabrielle Svenning, 415/882.9494 gabrielle@loomisgroup.com

 

Tegal Corporation
Jim McKibben, 707/763.5600
jmckibben@tegal.com
or
The Loomis Group, Inc.
Gabrielle Svenning, 415/882.9494
gabrielle@loomisgroup.com
 
E-mail: gabrielle@loomisgroup.com
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