Matheson Tri-Gas Introduces Breakthrough Purification Technology for Corrosive Gases
San Jose, CA. Matheson Tri-Gas, Inc., the pioneer in corrosive gas purification, has introduced a new, breakthrough purification compound, NANOCHEM MetalX(TM) Corrosive Gas Purification Medium.
This patented compound, based upon activated inorganic materials, has been proven to remove moisture and volatile metals. This technology enhances Matheson s line of NANOCHEM purification solutions for 32 semiconductor gases, and has been proven in low temperature, SiGe Epi CVD.
NANOCHEM MetalX(TM) purifiers can be used at full cylinder pressure for corrosive gases, such as HCl, HBr and Cl2, and offer a substantial increase in lifetime over existing products. MetalX(TM) purifiers have been proven to remove H2O, which causes corrosion, and volatile metals such as Fe, Mo, Cr, Ti, Ni, and Mn from HCl gas, which can adversely affect the electrical properties of semiconductor devices. In Epi CVD reactors, metals can shorten the life of SiC-coated graphite susceptors. NANOCHEM MetalX(TM) applications include high and low temp Si Epi, GaN etch, polysilicon, fiber optics, and compound semiconductor manufacturing.
"We are seeing a significant increase in demand for purification of corrosive gases, such as hydrogen chloride, hydrogen bromide and chlorine, due to advances in the semiconductor and optoelectronics markets. By removing moisture and metals from corrosive gases, NANOCHEM MetalX(TM) purifiers prevent the corrosion of gas delivery equipment, and also remove killer volatile metal impurities that pass through 0.003 um particle filters," said Roy E. Nemoto, NANOCHEM business director.
With over 70 years of experience, Matheson Tri-Gas is a single source provider of specialty gases, bulk gases, gas handling equipment, purification systems and support services to the semiconductor manufacturers worldwide. The Semi-Gas Division s core competencies include its ULTRA-LINE high purity process gases, SDS(R) Safe Delivery Source(R), Semi-Gas Systems brand of gas handling equipment, NANOCHEM brand of purification systems, customer technical services, systems engineering and site management services.
Headquartered in San Jose, Calif., the Semi-Gas Division is a division of Matheson Tri-Gas, located in Parsippany, N.J. The parent company, Nippon Sanso Corporation (NSC), is the world s largest supplier of gases and equipment to the semiconductor industry. The Semi-Gas Division corporate offices are located at 625 Wool Creek Drive, San Jose, CA 95112. Telephone: 408/971-6500. Fax: 408/275-8643.
Note to Editors: Semi-Gas Systems, UltraLine and NANOCHEM are registered trademarks of Matheson Tri-Gas Incorporated. SDS and Safe Delivery Source are registered trademarks of Matheson TriGas Inc. and Advanced Technology Materials, Inc.
Contact: Matheson Tri-Gas, Semi-Gas Division Valerie Beck Tel: 408/971-6500, Ext. 431 VBeck@matheson-trigas.com
Matheson Tri-Gas, Semi-Gas DivisionValerie Beck
Tel: 408/971-6500, Ext. 431
VBeck@matheson-trigas.com
E-mail: VBeck@matheson-trigas.com
