Technical Insight
Communications Technology Orders Tegal Etch System (Materials and Equipment)
Global Communications Technology Orders Tegal Etch System Tegal (Petaluma, CA) has received an order from Taiwan-based Global Communications Technology for a 901G diode plasma etch system. The system is configured for nitride applications and will be used to produce GaAs devices for the telecommunications market. Scheduled for installation February 2001, the 900G series is scalable from 3- to 6-inch wafers and includes an automated cassette-to-cassette etch system for GaAs substrates. Global Communications Technology operates a 6-inch GaAs wafer fab in Hsin Chu, where it manufactures HBTs, PHEMTs, digital ICs and optoelectronic devices.
