Pfeiffer Vacuum+Fab introduces CenterLine CNR Series
Pfeiffer Vacuum+Fab Solutions, part of the Busch Group, has announced the CenterLine CNR series, which is suited to the harsh operating conditions in the semiconductor industry.
The CenterLine CNR series consists of analogue capacitive vacuum gauges that can measure over four decades in the full scale between 0.1 and 1000 Torr. Available in heated and unheated variants, the CNR series expands the existing CenterLine product family and delivers reliable measurements even under the harshest operating conditions, according to the company.
CNR gauges are used in combination with pressure control valves and can be employed for a wide range of applications in the semiconductor industry, such as dry etching, CVD and ALD processes. They can also be implemented for analytics, R&D, and various other industries. In this expansion to the product series, five different versions are available: the 36x, 37x, 38x, 39x and 30x. All products in the series are SEMI S2 compliant.
The CenterLine CNR series provides a variety of options for processes at different temperatures. The 36x is an unheated variant for reliable measurements at ambient temperature with an accuracy of 0.2 percent. Self-heating versions are also available at 45, 100, 160 and 200 °C. The 45 °C variant provides an accuracy of 0.15 percent, making it suitable for calibration laboratories and high-quality control. With an accuracy of 0.4 percent, the other self-heating versions allow higher accuracy of readings in high-temperature or hot gas processes than comparable gauges.
A diaphragm sensor forms the heart of the measurement device. It is protected by a stable and resistant ceramic shield coated through atomic layer deposition (ALD). The shield protects the sensor both from exposure to the high temperatures of the process gases and from potential corrosion. This enables reliability and accuracy as well as a longer sensor life, even under harsh plasma, due to minimised contamination. As sensor drift is also reduced, calibration is required less frequently and thus the overall cost of ownership is lowered.
The gauges in the CenterLine CNR series are equipped with a special filter setting known as 'p-control' or pressure control. This is designed to be fast and adaptive, enabling the gauge to respond more quickly to pressure changes as well as provide accurate and smooth pressure control. This feature is particularly effective in combination with a pressure control valve.
Similar to other CenterLine gauges, the CNR series has been designed for easy integration into existing installations with measurement technology from other manufacturers.
