Info
Info
News Article

Oxford Instruments Revolutionises Single Wafer Etch Technology

The firm's PlasmaPro 100 Sapphire can be used for etching III-nitride HBLED materials and is claimed to minimise cost of ownership and maximise yield
Oxford Instruments Plasma Technology a major supplier of plasma processing equipment, presents an evolution in single wafer etch technology, the PlasmaPro 100 Sapphire.

Designed to enable the Solid State Lighting revolution, Oxford Instruments has applied its experience of etching all HBLED materials to this new system that minimises cost of ownership and maximises yield.



PlasmaPro 100 Sapphire tool

The PlasmaPro 100 Sapphire single wafer etch system offers smart solutions to produce the etch results required to maintain the manufacturers’ competitive edge in this rapidly expanding market sector.

Michelle Bourke, Production Business Group Director at Oxford Instruments,says, “The PlasmaPro 100 Sapphire is designed specifically to address the harsh chemistries required for HBLED materials, delivering fast etch rates uniformly on wafers up to 200mm in diameter. At Oxford Instruments we strive to provide the most innovative, cost effective and reliable process solutions for our customers. This latest system is designed to encompass all these requirements."

Key system features and benefits include: Electrostatic Clamp technology capable of clamping Sapphire, GaN on Sapphire and Silicon; a high power ICP source producing a high density plasma; magnetic spacer for enhanced ion control; and a high conductance pumping system delivering maximum gas throughput at low pressures. Above all it has been developed with reliability, uptime and ease of serviceability in mind.

Solid-state lighting has the potential to revolutionise the lighting industry. LEDs traditionally used in displays are evolving to provide illumination for domestic use as governments legislate globally to make consumers switch to energy-efficient LEDs.

Oxford Instrument’s PlasmaPro 100 Sapphire’s technology promises manufacturers the tools to deliver more efficient, lower cost lighting that is needed worldwide to assist the lighting revolution.



AngelTech Live III: Join us on 12 April 2021!

AngelTech Live III will be broadcast on 12 April 2021, 10am BST, rebroadcast on 14 April (10am CTT) and 16 April (10am PST) and will feature online versions of the market-leading physical events: CS International and PIC International PLUS a brand new Silicon Semiconductor International Track!

Thanks to the great diversity of the semiconductor industry, we are always chasing new markets and developing a range of exciting technologies.

2021 is no different. Over the last few months interest in deep-UV LEDs has rocketed, due to its capability to disinfect and sanitise areas and combat Covid-19. We shall consider a roadmap for this device, along with technologies for boosting its output.

We shall also look at microLEDs, a display with many wonderful attributes, identifying processes for handling the mass transfer of tiny emitters that hold the key to commercialisation of this technology.

We shall also discuss electrification of transportation, underpinned by wide bandgap power electronics and supported by blue lasers that are ideal for processing copper.

Additional areas we will cover include the development of GaN ICs, to improve the reach of power electronics; the great strides that have been made with gallium oxide; and a look at new materials, such as cubic GaN and AlScN.

Having attracted 1500 delegates over the last 2 online summits, the 3rd event promises to be even bigger and better – with 3 interactive sessions over 1 day and will once again prove to be a key event across the semiconductor and photonic integrated circuits calendar.

So make sure you sign up today and discover the latest cutting edge developments across the compound semiconductor and integrated photonics value chain.

REGISTER FOR FREE

VIEW SESSIONS

Info
×
Search the news archive

To close this popup you can press escape or click the close icon.
×
Logo
×
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in:
 
X
Info
X
Info
{taasPodcastNotification}
Live Event