News Article

In-situ Monitoring Speeds Up InP Nanowire Production

Researchers have found that in-situ monitoring can provide vital information on the evolution of indium phosphide nanowire lengths and diameters during growth
Nanowires, sometimes called nanorods, are becoming more and more attractive for next generation LED and solar cell applications.

One of the reasons is the fact that epitaxial III-V nanowire arrays combine 1-dimensional electronic states with additional degrees of freedom for strain relaxation and resonant electromagnetic interaction.

The most critical parameters for nanowires’ optical response are their length and diameter. Usually, time consuming and destructive ex-situ methods like scanning electron microscopy (SEM) are used for characterisation before further processing.

But now, LayTec and the Nanometre Structure Consortium at Lund University in Sweden have jointly developed a solution for real-time quantitative monitoring of III-V nanowire growth.

The team of Lars Samuelson used LayTec’s spectroscopic in-situ reflectometer EpiR to monitor nanowire epitaxy in an AIXTRON 200/4 reactor. The image below shows the LayTec software display at the end of the MOCVD run where InP shells were grown on InP core nanowires.

LayTec software display at the end of a nanowire growth run. In the plot, shown on the left, the reflectance is given by the colour. (©nmC@LU)

The data of previous ex-situ analysis by SEM and spectroscopic reflectance were used by Nicklas Anttu of Lund University to develop numerical algorithms for deduction of the average length and diameters of the growing nanowire ensemble. This work is described in more detail in the paper, "Optical Far-Field Method with Subwavelength Accuracy for the Determination of Nanostructure Dimensions in Large-Area Samples," by N. Anttu et al, in Nano Letters, 2013, 13 (6), pp 2662 - 2667. DOI: 10.1021/nl400811q

Together with these algorithms, the in-situ spectroscopic measurements by EpiR provide information on the evolution of nanowire length and diameter during growth.

SEM image of InP nano-wires structured with gold particles by nanoimprint lithography. ©nmC@LU.

EpiR enables effective process optimisation, speeds up development and paves the way to future process transfer for industrial nanowire growth. LayTec believes in-situ metrology will be a must in nanowire applications in the near future.

AngelTech Live III: Join us on 12 April 2021!

AngelTech Live III will be broadcast on 12 April 2021, 10am BST, rebroadcast on 14 April (10am CTT) and 16 April (10am PST) and will feature online versions of the market-leading physical events: CS International and PIC International PLUS a brand new Silicon Semiconductor International Track!

Thanks to the great diversity of the semiconductor industry, we are always chasing new markets and developing a range of exciting technologies.

2021 is no different. Over the last few months interest in deep-UV LEDs has rocketed, due to its capability to disinfect and sanitise areas and combat Covid-19. We shall consider a roadmap for this device, along with technologies for boosting its output.

We shall also look at microLEDs, a display with many wonderful attributes, identifying processes for handling the mass transfer of tiny emitters that hold the key to commercialisation of this technology.

We shall also discuss electrification of transportation, underpinned by wide bandgap power electronics and supported by blue lasers that are ideal for processing copper.

Additional areas we will cover include the development of GaN ICs, to improve the reach of power electronics; the great strides that have been made with gallium oxide; and a look at new materials, such as cubic GaN and AlScN.

Having attracted 1500 delegates over the last 2 online summits, the 3rd event promises to be even bigger and better – with 3 interactive sessions over 1 day and will once again prove to be a key event across the semiconductor and photonic integrated circuits calendar.

So make sure you sign up today and discover the latest cutting edge developments across the compound semiconductor and integrated photonics value chain.



Search the news archive

To close this popup you can press escape or click the close icon.
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.

Please subscribe me to:


You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in:
Live Event