News Article

Samco Unleashes Production Etch System For SiC Power Devices

The silicon carbide system holds up to 25, six inch wafers at a time and automatically delivers wafers to the process chamber via a transfer/load-lock chamber

Samco Inc. of Kyoto, Japan, has released a new cassette-to-cassette production etch system, the model RIE-600iPC, for SiC processing.

The main system applications are planar processing for SiC power devices, fine trench etching for SiC MOS structures, SiC through-wafer etching for via hole formation, and SiO2 mask etching.

The new RIE-600iPC is a production system based on a proven RIE-600iP platform used for R&D and semi-production.

RIE-600iPC  production etch system

SiC, a wide band-gap semiconductor with a high dielectric voltage and capable of high temperature device operation, presents processing challenges such as preservation of sidewall smoothness and etching profile at high etch rates, while maintaining high enough etch mask selectivity.

The RIE-600iPC employs a patented Tornado ICP coil capable of high power, high-density RF plasma (at up to 3kW) under high vacuum conditions. With a height-adjustable lower electrode and high-capacity vacuum pump (1,300 litres/sec), the system enables high-speed SiC etching with excellent uniformity and can provide customers with a wide process window.

The system holds up to 25, six inch wafers at a time in a vacuum cassette chamber, and automatically delivers wafers to the process chamber via a transfer/load-lock chamber. The vacuum cassette chamber provides greater processing and production efficiency.

Samco introduced the RIE-600iPC at The International Conference on Silicon Carbide and Related Materials, which was held at Phoenix Seagaia Resort in Miyazaki, Japan.

Samco, a supplier of etch, CVD and cleaning systems for the semiconductor industry, has set its sights on becoming the leading provider of process equipment for next-generation power devices.


AngelTech Live III: Join us on 12 April 2021!

AngelTech Live III will be broadcast on 12 April 2021, 10am BST, rebroadcast on 14 April (10am CTT) and 16 April (10am PST) and will feature online versions of the market-leading physical events: CS International and PIC International PLUS a brand new Silicon Semiconductor International Track!

Thanks to the great diversity of the semiconductor industry, we are always chasing new markets and developing a range of exciting technologies.

2021 is no different. Over the last few months interest in deep-UV LEDs has rocketed, due to its capability to disinfect and sanitise areas and combat Covid-19. We shall consider a roadmap for this device, along with technologies for boosting its output.

We shall also look at microLEDs, a display with many wonderful attributes, identifying processes for handling the mass transfer of tiny emitters that hold the key to commercialisation of this technology.

We shall also discuss electrification of transportation, underpinned by wide bandgap power electronics and supported by blue lasers that are ideal for processing copper.

Additional areas we will cover include the development of GaN ICs, to improve the reach of power electronics; the great strides that have been made with gallium oxide; and a look at new materials, such as cubic GaN and AlScN.

Having attracted 1500 delegates over the last 2 online summits, the 3rd event promises to be even bigger and better – with 3 interactive sessions over 1 day and will once again prove to be a key event across the semiconductor and photonic integrated circuits calendar.

So make sure you sign up today and discover the latest cutting edge developments across the compound semiconductor and integrated photonics value chain.



Search the news archive

To close this popup you can press escape or click the close icon.
Register - Step 1

You may choose to subscribe to the Compound Semiconductor Magazine, the Compound Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.

Please subscribe me to:


You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in:
Live Event