BluGlass enters collaboration with Aixtron
Evaluation of RPCVD technology is carried out with AIX 2800G4-HT system
Aixtron, a provider of deposition equipment, has announced that it is collaborating with Australian technology innovator, BluGlass to evaluate BluGlass’ remote plasma deposition (RPCVD) technology.
BluGlass has selected the AIX 2800G4-HT system for the scaling of RPCVD to mass production capacities. Aixtron’s Planetary Reactor delivers class leading semiconductor film uniformity due to its proprietary dual axis of wafer rotation during deposition. RPCVD technology enables low temperature deposition of III-V nitrides which could potentially improve the performance of devices. The first integration of RPCVD onto the AIX 2800G4-HT will be conducted at BluGlass’ Silverwater facility in Sydney, Australia.
BluGlass’ managing director Giles Bourne said: “We are very pleased to have the support from Aixtron for this major scaling project of our technology. This is an important step towards demonstrating the commercial viability of RPCVD in large scale manufacturing.”
Aixtron’s group innovation officer Ken Teo added: “At Aixtron, we are constantly striving to bring novel technologies onto our platforms in order to provide our customers with advanced capabilities. We want to explore the potential of RPCVD technology for low temperature deposition of nitride layers which may open up new possibilities for optoelectronic devices. We look forward to working with BluGlass in integrating RPCVD and evaluating the technology.”